Microdynamics and Nanodynamics: Materials, Structures and Devices

微观动力学和纳米动力学：材料、结构和器件

• 批准号: 8915277
• 负责人: Noel MacDonald
• 金额: $ 32.42万
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1989
• 资助国家: 美国
• 起止时间: 1989-08-15 至 1993-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=8915277&HistoricalAwards=false
• 关键词: Microdynamics; Nanodynamics; Materials; Structures; Devices

The goals of this research are to develop material processes, lithographic processes, and characterization techniques necessary for the fabrication of microelectromechanical systems (MEMS). This research builds on previous research to expand knowledge of CVD tungsten processing for MEMS. The focus of this research will include: (1) the development of tungsten and silicon carbide multilevel, thin film processes compatible with current silicon and polysilicon technology; (2) the development of frame and truss structures to achieve high strength-to-weight structures analogous to framed macroscopic structures; (3) exploration of the fabrication of nanomechanical structures using electron beam lithography and compatible processes; (4) the development of time- resolved, high spatial resolution electron beam characterization techniques to probe motion, voltage distributions, and surface and bulk chemistry in MEMS; and (5) the development of integrated circuits, control algorithms and feedback systems to control on-chip MEMS.

这项研究的目标是开发材料， 工艺、光刻工艺和表征 制造所需的技术 微机电系统（MEMS）。 本研究 建立在以前的研究，以扩大知识的心血管疾病 用于MEMS的钨加工。 的重点 研究将包括：（1）钨的开发 和碳化硅多层薄膜工艺 与现有的硅和多晶硅兼容 技术;（2）框架和桁架的发展 实现高强度重量比结构的结构 类似于框架宏观结构;（3） 纳米机械制造的探索 使用电子束光刻的结构， （4）时间的发展-- 分辨的高空间分辨电子束 探头运动、电压、 分布，以及MEMS中的表面和体化学; （5）集成电路、控制技术的发展 算法和反馈系统来控制片上 微机电系统