Engineering Research Equipment: Electronics and Software for Nanoelectromechanical STM

电气工程学院 康奈尔大学将收购Scanning Tunnel显微镜设备和软件 将致力于支持研究， 工程. 该设备将用于 一些研究项目，包括 特别是：NSF赞助的项目 “微动力学和纳米动力学：材料 结构与器件：半导体 研究公司项目，“大规模地 并行电子束结构 电子束光刻;和DARPA 赞助的射频项目（与雷神公司合作） 真空微电子 所有这些项目 使用20 nm直径的硅尖端或阵列 硅尖制造隧道显微镜 器件或生产场发射器阵列， 电子束仪器或真空 微电子器件 我们设计了一个 独特的纳米机电仪器： 高速（5 MHz）扫描隧道器件 用来制造独特的传感器 声音、辐射、质量、压力， 加速度 扫描隧道显微镜（STM） 设备和软件要求在此 我们的提案将用于推动我们的 纳米机电隧穿器件， 为了表征所处理的尖端形成， 硅场和隧穿尖端结构两者。

The School of Electrical Engineering at Cornell University will purchase Scanning Tunneling Microscope equipment and software which will be dedicated to support research in engineering. The equipment will be used for several research projects, including in particular: the NSF sponsored project "Microdynamics and Nanodynamics: Materials Structure and Devices: the Semiconductor Research Corporation project, "Massively Parallel Electron Beam Architecture for Electron Beam Lithography; and a DARPA sponsored project (with Raytheon) on RF Vacuum Microelectronics. All these projects use 20 nm diameter silicon tips or arrays of silicon tips to produce tunneling microscope devices or to produce field emitter arrays for electron beam instrumentation, or vacuum microelectronic devices. We have designed a unique nanoelectromechanical instrument: a high-speed (5 MHz) scanning tunneling device to be used to make unique sensors to detect sound, radiation, mass, pressure, and acceleration. The Scanning Tunneling Microscope (STM) equipment and software requested in this proposal will be used to drive our nanoelectromechanical tunneling devices and to characterize the tip formation processed for both silicon field and tunneling tip structures.