Research Equipment Grant: Acquisition of a Scanning ElectronMicroscope for Imaging, Microanalysis and E-Beam Lethography

私家侦探们提议用扫描电子 具有EDS X射线检测系统的显微镜、载物台和 电子光学柱自动化，图像采集， 加工和电子束光刻软件。 具体地，使用JEOL JSM 6400 SEM和Link Analytical eXL 分析仪和LZ4 Si（Li）探测器，载物台和光束自动化 需要硬件和软件。 显微镜将 被许多工程研究项目所使用， 材料科学、微电子学和摩擦学。 其他用途将用于生物医学工程， 相关领域 显微镜将被安置在 由Rippel电子显微镜设施操作， 达特茅斯学院。 设施人员将培训其他人员， 显微镜的使用和护理，并将监督 正确使用显微镜。

The P.I.s propose the acquisition of a scanning electron microscope with an EDS x-ray detection system, stage and electron optical column automation, image acquisition, processing and electron beam lithography software. Specifically, a JEOL JSM 6400 SEM and Link Analytical eXL analyzer and LZ4 Si(Li) detector, stage and beam automation hardware and software are requested. The microscope will be used by a number of engineering research programs in materials science, microelectronics and tribology. Additional uses will be in biomedical engineering and related fields. The microscope will be housed in and operated by the Rippel Electron Microscope Facility at Dartmouth College. Facility personnel will train others in the use and care of the microscope and will oversee appropriate use of the microscope.