Research Equipment Grant: Acquisition of a Scanning ElectronMicroscope for Imaging, Microanalysis and E-Beam Lethography

研究设备补助金：购买用于成像、微量分析和电子束平版印刷的扫描电子显微镜

• 批准号: 9010482
• 负责人: Albert Henning
• 金额: $ 7.5万
• 依托单位: Dartmouth College
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1990
• 资助国家: 美国
• 起止时间: 1990-08-15 至 1991-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9010482&HistoricalAwards=false
• 关键词: Research; Equipment; Grant; Acquisition; Scanning

The P.I.s propose the acquisition of a scanning electron microscope with an EDS x-ray detection system, stage and electron optical column automation, image acquisition, processing and electron beam lithography software. Specifically, a JEOL JSM 6400 SEM and Link Analytical eXL analyzer and LZ4 Si(Li) detector, stage and beam automation hardware and software are requested. The microscope will be used by a number of engineering research programs in materials science, microelectronics and tribology. Additional uses will be in biomedical engineering and related fields. The microscope will be housed in and operated by the Rippel Electron Microscope Facility at Dartmouth College. Facility personnel will train others in the use and care of the microscope and will oversee appropriate use of the microscope.

私募股权投资公司提议购买一台带有EDS X射线探测系统的扫描电子显微镜、舞台和电子光柱自动化、图像采集、处理和电子束光刻软件。具体地说，需要JEOL JSM 6400扫描电子显微镜和链接分析EXL分析仪和LZ4 Si(Li)探测器、舞台和光束自动化硬件和软件。该显微镜将用于材料科学、微电子学和摩擦学的许多工程研究项目。其他用途将在生物医学工程和相关领域。显微镜将被安置在达特茅斯学院的里佩尔电子显微镜设施中并由其操作。设施人员将对其他人进行显微镜使用和护理方面的培训，并监督显微镜的适当使用。