NSF Self-Sufficient Partnership for Research with Universityof Arizona Center for Microcontamination Control

亚利桑那大学I/UCR微污染控制中心主要研究微电子工业的微污染问题，微电子工业在推动美国在世界上的竞争力方面发挥着关键作用。该中心已经运作了六年半，完全遵守了研究所/UCRC的指导方针。本中心一直活跃于若干研究领域，包括：(1)蚀刻液中粒子的电动力学行为；(2)真空系统中粒子的检测和形成；(3)生产环境中静电放电的检测和控制；(4)利用电磁散射对粒子的检测和评价；(5)洁净室气溶胶动力学的建模。中心的质量也得到了其他机构的认可。该中心的专业知识有助于亚利桑那大学获得污染和缺陷控制领域的SEMATECH中心。该中心补充了研究所/UCRC的活动。项目经理建议亚利桑那大学I/UCRC微污染控制研究中心每年获得3万美元，为期三年，作为一个自给自足的工业/大学合作研究中心伙伴关系。

The University of Arizona's I/UCR Center for Microcontamination Control which primarily studies microcontamination problems for the microelectronics industry, an industry with a key role to play in the drive for U.S. competitiveness in the world. The Center has been in operation for six and one half years, in fully compliance with I/UCRC guidelines. The Center has been active in a number of research areas including: (1) The electrokinetic behavior of particles in liquids used in etch baths, (2) Particle detection and formation in vacuum systems, (3) The detection and control of electrostatic discharge in production situations, (4) The detection and evaluation of particles using electromagnetics scattering, and (5) The modeling of Cleanroom Aerosol Dynamics. The quality of the Center has also been recognized by others. The expertise in the Center was instrumental in the award of a SEMATECH Center in the area of Contamination and Defect Control to the University of Arizona. This Center complements the activities of the I/UCRC. The Program Manager recommends that the University of Arizona I/UCRC for Microcontamination Control be awarded $30,000 per year for three years for a Self-Sufficient Industry/University Cooperative Research Center Partnership.