NSF Self-Sufficient Partnership for Research with Universityof Arizona Center for Microcontamination Control

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The University of Arizona's I/UCR Center for Microcontamination Control which primarily studies microcontamination problems for the microelectronics industry, an industry with a key role to play in the drive for U.S. competitiveness in the world. The Center has been in operation for six and one half years, in fully compliance with I/UCRC guidelines. The Center has been active in a number of research areas including: (1) The electrokinetic behavior of particles in liquids used in etch baths, (2) Particle detection and formation in vacuum systems, (3) The detection and control of electrostatic discharge in production situations, (4) The detection and evaluation of particles using electromagnetics scattering, and (5) The modeling of Cleanroom Aerosol Dynamics. The quality of the Center has also been recognized by others. The expertise in the Center was instrumental in the award of a SEMATECH Center in the area of Contamination and Defect Control to the University of Arizona. This Center complements the activities of the I/UCRC. The Program Manager recommends that the University of Arizona I/UCRC for Microcontamination Control be awarded $30,000 per year for three years for a Self-Sufficient Industry/University Cooperative Research Center Partnership.