Theoretical Modeling of Micro-electro-mechanical Systems

这是一个为期三年的计划在理论 微机电系统建模 结合来自世界各地的调查人员 电气工程和土木工程 凯斯西储大学Case Western Reserve University 该计划的目标是进行理论研究， 研究，以获得基本的了解， 机电和（机械）接口 微机电特性 设备和生产模型，可以预测 这些设备的机电性能。 深入了解这些 机电和界面性能以及 因为预测理论模型对于 成功设计和制造了 微机电系统（MEMS）。 研究计划分为两部分： (i)先进计算技术的发展 电磁，（机械）应力， 和耦合电磁场/应力场分析 微机电装置和（ii） 开发理论界面模型， 摩擦、润滑和磨损， 微机电装置 这两部分 对目标有协同关系 如上所述。

This is a three-year program in Theoretical Modeling of Microelectromechanical Systems combining the efforts of investigators from the Electrical Engineering and Civil Engineering Department at Case Western Reserve University. The program objectives are to carry out theoretical studies to gain a fundamental understanding of electromechanical and (mechanical) interface characteristics of microfabricated electromechanical devices and to produce models which can predict the electromechanical performance of these devices. A thorough understanding of these electromechanical and interface properties as well as predictive theoretical models is necessary for successful design and fabrication of microelectromechanical systems (MEMS). The research program is organized into two parts: (i) development of advanced computational techniques for electromagnetic, (mechanical) stress, and coupled electromagnetic/stress fields analysis in microelectromechanical devices and (ii) development of theoretical interface models for friction, lubrication, and wear in microelectromechanical devices. These two parts have a synergetic relation toward the objectives stated above.