Undergraduate Microelectronics Processing Laboratory

本项目的重点是开发一套微电子加工的本科实验课程。这些课程通过为学生提供实践经验来补充微电子学广泛的讲座课程。第一季度的课程集中在实验上，教授器件制造的步骤，如光刻胶、蚀刻和氧化。第二季度的课程允许对制作的科学细节进行更深入的研究。鉴于微电子学的进步历来是跨学科活动的结果，本课程将提供给物理、化学、化学工程、电子工程和材料工程的学生。这个项目意义重大，因为它将通过动手实验室实验向本科生介绍微电子器件的制造过程。

This project focuses on the development of a set of undergraduate laboratory courses in microelectronics processing. These courses complement the extensive collection of lecture classes in microelectronics by providing hands-on experience for the students. The first quarter course concentrates on experiments to teach the steps of device fabrication such as photoresist, etching and oxidation. The second quarter course allows deeper investigation of the scientific details of fabrication. Given that progress in microelectronics has historically been a result of strong interdisciplinary activity, the course will be offered to students in physics, chemistry, chemical engineering, electrical engineering, and materials engineering. This project is significant because it will introduce the microelectronic device fabrication process to undergraduates early in their academic life through hands-on laboratory experimentation.