Combination Effluent Scrubber/Heat Recovery System for Semiconductor Processes

开发一种简单、高效、非化学特异性的废水处理系统将对半导体加工工业产生巨大的好处。在这个SBIR项目中提出的洗涤器将通过冷凝到低温冷却表面来去除工艺废气中的反应副产物。一旦浓缩成液体或固体，废物将被机械分离，无害物质将被释放，有毒物质将被焚烧，并收集灰烬用于危险废物处理。该研究的第二个目标是检验使用（液态）氮作为热机的工作流体，从气流中提取废热作为功的可行性。研究的最终目标将是一个商业系统，该系统将液化空气，从氮气中分离出氧气，从工业废水中浓缩然后焚烧，从焚烧中浓缩废物，并使用收集的能量来液化更多的空气。这样的系统很可能产生多余的能量，并减少有毒废物的排放。

The development of a simple, efficient, nonchemistry-specific effluent treatment system would be of tremendous benefit to the semiconductor process industry. The scrubber proposed in this SBIR project would remove reaction by-products from the process exhaust by condensation onto cryogenically cooled surfaces. Once condensed as liquid or solid, the waste would be separated mechanically, nonhazardous material would be released, toxic material would be incinerated, and the ash collected for hazardous waste disposal. A secondary objective of the research is to examine the feasibility of using the (liquid) nitrogen as the working fluid of a heat engine, to extract waste heat as work from the gas stream. The final goal of the research will be a commercial system which will liquefy air, separate out the oxygen from the nitrogen, condense and then incinerate the waste from industrial effluent, condense the waste from the incineration, and use the energy thus collected to liquefy more air. Such a system may well be able to generate excess energy, as well as decrease toxic waste emissions.