REG: In-vacuo X-ray Photoelectron Spectroscopic System: For Surface Analysis of Diamond Films Grown by Hot Filament and DC-Plasma Co-enhanced Chemical Vapor Deposition

REG：真空 X 射线光电子能谱系统：用于热丝和直流等离子体协同增强化学气相沉积生长的金刚石薄膜的表面分析

• 批准号: 9112098
• 负责人: Jeffrey Glass
• 金额: $ 6.8万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1991
• 资助国家: 美国
• 起止时间: 1991-07-01 至 1992-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9112098&HistoricalAwards=false
• 关键词: REG; vacuo; ray; Photoelectron; Spectroscopic

An X-ray photoelectron spectroscopic (XPS) surface analysis system will be purchased and constructed to support a number of studies of diamond film growth. The equipment will permit in situ studies of the nature of the chemical bonds which form during film growth for diamond films grown by hot filament and DC plasma co-enhanced chemical vapor deposition. The results will be used to determine the growth mechanisms and details of the surface properties.

一种X射线光电子能谱（XPS）表面分析系统， 将购买和建造，以支持一些研究 金刚石薄膜的生长 该设备将允许进行现场研究 薄膜生长过程中形成的化学键的性质 对于用热灯丝和直流等离子体共同增强生长的金刚石薄膜， 化学气相沉积 结果将用于确定 生长机制和表面性质的细节。