REG: In-vacuo X-ray Photoelectron Spectroscopic System: For Surface Analysis of Diamond Films Grown by Hot Filament and DC-Plasma Co-enhanced Chemical Vapor Deposition

将购买和建造一个X射线光电子能谱(XPS)表面分析系统，以支持对金刚石薄膜生长的若干研究。该设备将允许现场研究由热丝和直流等离子体共增强化学气相沉积生长的金刚石薄膜在生长过程中形成的化学键的性质。结果将被用来确定生长机制和表面性质的细节。

An X-ray photoelectron spectroscopic (XPS) surface analysis system will be purchased and constructed to support a number of studies of diamond film growth. The equipment will permit in situ studies of the nature of the chemical bonds which form during film growth for diamond films grown by hot filament and DC plasma co-enhanced chemical vapor deposition. The results will be used to determine the growth mechanisms and details of the surface properties.