Laser-Enhanced Adhesion of Metallic Films Onto Ceramic Substrates

将进行基础研究，以提高对使用脉冲激光辐射的金属薄膜与陶瓷衬底的粘附性的理解。本研究的一个特点是激光增强附着力的原理。我们建议将先前的工作结果扩展到其他金属和陶瓷，并系统地探索这种现象的原子水平方面，以了解激光增强粘附的基本基础。这项研究有望对薄膜的基本特性提供更深入的基本理解，这些特性对电子/光子材料的功能以及与微电子电路封装相关的特定成分和结构组合和配置至关重要。从应用的角度来看，了解这些特性及其与材料合成和加工的关系对半导体电路的设计和制造非常有益。研究结果对大规模、高速集成电子和光子器件及电路技术具有普遍意义。

Fundamental research to improve understanding of adhesion of metallic films to ceramic substrates using pulsed laser radiation will be conducted. A special feature of the research is the principle of laser enhanced adhesion. It is proposed to extend the results of previous work to other metals and ceramics, and to systematically explore the atomic level aspects of the phenomena to gain an understanding of the elementary basis for laser-enhanced adhesion. %%% This research is expected to provide deeper fundamental understanding of basic properties of thin films important to the functionality of electronic/photonic materials and particular compositional and structural combinations and configurations relevant to microelectronic circuitry packaging. From an application point of view, understanding these properties and their relationship to materials synthesis and processing is highly beneficial to semiconductor circuit design and fabrication. The results will be of importance in a general way to the technology of large scale, high speed integrated electronic and photonic devices and circuits.