Acquisition of a Pulsed Excimer Laser with a Deposition Module

使用沉积模块采集脉冲准分子激光器

• 批准号: 9601800
• 负责人: Anthony Pedraza
• 金额: $ 10万
• 依托单位: University of Tennessee Knoxville
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-08-15 至 1998-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9601800&HistoricalAwards=false
• 关键词: Acquisition; Pulsed; Excimer; Laser; Deposition

9601800 Pedraza A laser deposition and processing system consisting of a high- energy, high-repetition pulsed excimer laser and a processing/deposition chamber will be established at the University of Tennessee. Continuing and new research activities supported by this acquisition include fundamental studies of pulsed laser processing of ceramics and metal-semiconductor couples; pulsed laser deposition and bonding of bioceramics to metal alloys; photothermal and photochemical mechanisms for laser activation and encapsulation; and synthesis of super-hard materials using energetic laser ablation. The combination of the laser and processing/deposition chamber will enhance presently aging and outdated capabilities by permitting depositions to be carried out quickly; by making possible combinations of film depositions and in-situ laser processing that are currently inaccessible; and by facilitating investigations at elevated substrate temperatures. %%% The research instrumentation will be used to support important materials research in the area of pulsed laser processing of metals and ceramics; to broaden this research by providing new experimental capabilities not currently available at the university; and to facilitate inter-departmental and inter- laboratory research collaborations within the University of Tennessee and with Oak Ridge National Laboratory. ***

小行星9601800 田纳西大学将建立一个由高能、高重复脉冲准分子激光器和加工/沉积室组成的激光沉积和加工系统。此次收购支持的持续和新的研究活动包括陶瓷和金属-半导体耦合的脉冲激光加工的基础研究;脉冲激光沉积和生物陶瓷与金属合金的结合;激光激活和封装的光热和光化学机制;以及使用高能激光烧蚀合成超硬材料。激光器和处理/沉积室的组合将通过允许快速进行沉积、通过使膜沉积和目前无法实现的原位激光处理的可能组合以及通过促进在升高的衬底温度下的研究来增强目前老化和过时的能力。 该研究仪器将用于支持金属和陶瓷脉冲激光加工领域的重要材料研究;通过提供该大学目前没有的新实验能力来扩大这一研究;并促进田纳西大学内部以及与橡树岭国家实验室的跨部门和跨实验室研究合作。 ***