Low-Cost Technologies for Microelectromechanical Systems

微机电系统的低成本技术

• 批准号: 9117074
• 负责人: Mark Allen
• 金额: $ 58.37万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1991
• 资助国家: 美国
• 起止时间: 1991-08-15 至 1995-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9117074&HistoricalAwards=false
• 关键词: Low; Cost; Technologies; Microelectromechanical; Systems

Research is proposed on three relatively low cost and manufacturable technologies for microelectromechanical systems (MEMS), which will contribute toward enabling commercial development of these systems. The first technology is a process for integrating optical-quality compound semiconductor materials onto silicon- based microstructures. This technology, which is based on a modification of epitaxial liftoff techniques for compound semiconductor materials, will enable the development of integrated optically- based sensors and actuators. The second technology involves the use of electroplating techniques coupled with polyimide-based electroplating forms to produce a low-cost alternative to the LIGA process for fabrication of high-aspect-ration microstructures. The third technology involves the design and fabrication of simple solar cell structures that can be used as self- contained power sources for MEMS. The solar cell structures will be optimized for the high-voltage, low-current needs of electrostatic microactuators, and designed such that they can be integrated directly with standard silicon-based microstructures.

研究提出了三个相对较低的成本 和可制造的技术， 微机电系统（MEMS）， 将有助于实现商业 这些系统的发展。 第一技术 是一个将光学质量 化合物半导体材料到硅上- 基于微结构。 这项技术， 基于外延剥离的改进 化合物半导体材料的技术， 将实现集成光学的发展- 基于传感器和执行器。 第二 技术涉及使用电镀 技术与聚酰亚胺基 电镀形式，以生产低成本 替代LIGA工艺制造 高纵横比微结构。 第三 技术包括设计和制造 简单的太阳能电池结构， 包含MEMS的电源。 太阳能电池 结构将针对高电压进行优化， 静电微致动器的低电流需求， 并且设计成它们可以被整合到 直接与标准硅基微结构结合。