Educational and Research Infrastructure Development in Microelectromechanical Systems

这个39万美元的奖项是为了支持教育中心 微机电研究基础设施的发展 系统. 该中心的使命是开发模型 跨学科教育计划和资源， 微机电系统（MEMS），其与 支持一个协调和集中的MEMS研究计划。 核心 拟议的计划是一个由四名教师组成的团队， 材料科学、电气工程和机械 工程师，其兴趣和专业知识涵盖MEMS的大部分领域 技术.教育工作包括课程开发， 研究生参与项目/研究 学生，研讨会，互动和推广到行业和 其他教育机构。 的研究部分， 该计划包括几个项目，重点是 共同目标是开发集成MEMS技术， 所有主要元件（微致动器、微传感器、微机械 器件和片上电子器件）可以兼容地制造在 一个共同的基板。

This award, of $390,000, is for support of a Center for Education Research Infrastructure Development in Microelectromechanical Systems. The mission of the center is to develop model interdisciplinary educational programs and resources in microelectromechanical systems (MEMS) which interact with and support a coordinated and focused MEMS research program. The core of the proposed program is a team of four faculty members from Materials Science, Electrical Engineering, and Mechanical Engineering, whose interests and expertise span most of MEMS technology. The educational efforts include course development, project/research involvement of graduate and undergradaute students, seminars, and interaction and outreach to industry and other educational institutions. The research component of the program consists of several projects which are focused on the common goal of developing an integrated MEMS technology in which all major elements (microactuators, microsensors, micromechanical devices, and on-chip electronics) can be compatibly fabricated on a common substrate.