Educational and Research Infrastructure Development in Microelectromechanical Systems

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This award, of $390,000, is for support of a Center for Education Research Infrastructure Development in Microelectromechanical Systems. The mission of the center is to develop model interdisciplinary educational programs and resources in microelectromechanical systems (MEMS) which interact with and support a coordinated and focused MEMS research program. The core of the proposed program is a team of four faculty members from Materials Science, Electrical Engineering, and Mechanical Engineering, whose interests and expertise span most of MEMS technology. The educational efforts include course development, project/research involvement of graduate and undergradaute students, seminars, and interaction and outreach to industry and other educational institutions. The research component of the program consists of several projects which are focused on the common goal of developing an integrated MEMS technology in which all major elements (microactuators, microsensors, micromechanical devices, and on-chip electronics) can be compatibly fabricated on a common substrate.