Materials Development and Processing for Fabrication of a Microdynamical Optical Switch (REU SUPPLEMENT)

用于制造微动力学光开关的材料开发和加工（REU 补充）

• 批准号: 9215070
• 负责人: Denice Denton
• 金额: $ 30.56万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1992
• 资助国家: 美国
• 起止时间: 1992-08-01 至 1996-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9215070&HistoricalAwards=false
• 关键词: Materials; Development; Processing; Fabrication; Microdynamical

The objective of this work is to develop the materials and processing capabilities required to fabricate an optical micro-switch for fiber optic networks. The switch consists of a polymer channel waveguide fabricated on a cantilevered micromechanical beam. This beam can be coupled to one of the two stationary polymer guides using an electrostatic comb drive. All three polymer guides are coupled to fiber pigtails via V-groove alignment. The use of polymer waveguides instead of fibers drastically reduces the reduces the required motion for alignment (and therefore the required switching power). Micromechanics, in addition to producing the switching action, makes fiber alignment and packaging relatively straightforward. Fabrication of such a device will require the marriage of high aspect ratio x-ray lithography fabrication and polymer processing. The micromechanical switch is fabricated in metal because of its superior mechanical properities. The optical waveguides are fabricated using polymers whose optical properties can be tailored for a variety of applications. The materials challenges to be addressed include the tailoring of the mechanical properties of electroplated metal films, the control of the optical properties of polymers, and the understanding of the long term reliability of the materials used. This device represents a synthesis of polymer, x-ray lithographic, and micromechanical processing. The materials and processes developed for this work will be useful for a wide array of applications in solid state circuits, sensors and actuators, and photonics.

这项工作的目标是开发 所需材料和加工能力 制作光纤微开关 光纤网络 交换机由一个 聚合物沟道波导制作在一个 悬臂微机械梁 这 梁可以耦合到两个 使用静电的固定聚合物导向器 梳状驱动 所有三种聚合物导向器均为 通过V形槽耦合到光纤尾纤 对齐。 聚合物波导的应用 而不是纤维， 减少了对准所需的运动 (and因此需要开关功率）。 微观力学，除了生产 开关动作，使光纤对准， 包装相对简单。 制造这样的装置将需要 高深宽比X射线光刻的结合 制造和聚合物加工。 的 微机械开关用金属制造 因为它具有优越的上级机械性能。 光波导使用以下材料制造： 聚合物，其光学性质可以 为各种应用量身定制。 的 需要解决的材料挑战包括 机械性能的定制 电镀金属薄膜，控制的 聚合物的光学性质， 长期可靠性的认识 使用的材料。 该设备代表了 聚合物合成、X射线平版印刷和 微机械加工 的材料 为这项工作开发的流程将 可用于固体中的广泛应用 状态电路、传感器和致动器，以及 光子学