Integration of High-Temperature Superconductor Thin Films with GaAs Monolithic Microwave Integrated Circuits

制作YBCO基无源微波器件的可行性 用脉冲激光器在GaAs单晶片上制作GaAs集成电路器件 沉积（PLD）、传统的光刻图案化和 将开发金属化技术。 超导 YBCO薄膜的性能，以选择最佳的缓冲膜 材料和薄膜沉积工艺将进行评估，以便 获得高质量的超导薄膜。 简单超导体 带状线滤波器将与GaAs低噪声集成 放大器，并评估器件性能。 的能力 在GaAs衬底上制备高温超导薄膜开辟了一个非常丰富的领域 许多超导薄膜技术的机会。

The feasibility of fabricating a YBCO based passive microwave device with GaAs ICs on a single GaAs wafer by in-situ Pulsed Laser Deposition (PLD), conventional photolithographic patterning and metalization techniques will be developed. The superconducting properties of the YBCO films to select the best buffer film material and film deposition process will be evaluated in order to obtain high quality superconductor films. A simple superconductor stripline filter will be integrated with a GaAs low noise amplifier, and the device performance evaluated. The ability to fabricate HTSC films on GaAs substrates opens up a very rich field of opportunity for many superconducting film technologies.