U.S.-Japan Cooperative Research: Soft X-Ray Imaging Optics

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9315132 Ginter This award supports a two-year cooperative research project between Professor Marshall Ginter, Institute for Physical Science and Technology, University of Maryland, and Professor Kojun Yamashita, Department of Physics, Nagoya University. The joint research involves the development of next generation soft x-ray (SXR) optical components and systems needed for such critical areas as SXR projection lithography, third-generation synchrotron radiation research, space platform telescopes and spectrometers, lithographic production of micro-machine parts, microscopy, and nonsynchrotron radiation SXR light sources. The project also involves Professor Howard Milchberg, University of Maryland, Professor John McNeil, University of New Mexico, and Japanese scientists at Tokyo University, Osaka University, and Tohoku University. The research deals with various problems associated with (1) optical and physical properties of new SXR optical materials (multilayers, etc.), (2) properties of new SXR optical devices (imaging and projection system, microscopes, telescopes, etc.), (3) evaluation and testing of SXR optical elements (aspheric surface figure, roughness, etc.), and (4) improvement to intense laboratory (non- synchrotron) SXR light sources. The U.S. and Japanese investigators' work is complementary and the joint research will provide a unique opportunity for mutually beneficial research. ***