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U.S.-Japan Cooperative Research: Soft X-Ray Imaging Optics

美日合作研究：软X射线成像光学

基本信息

批准号：
9315132
负责人：
Marshall Ginter
金额：
$ 2.33万
依托单位：
University of Maryland, College Park
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
1994
资助国家：
美国
起止时间：
1994-04-01 至 1996-12-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=9315132&HistoricalAwards=false
关键词：
U.S.Japan Cooperative Research Soft

项目摘要

9315132 Ginter This award supports a two-year cooperative research project between Professor Marshall Ginter, Institute for Physical Science and Technology, University of Maryland, and Professor Kojun Yamashita, Department of Physics, Nagoya University. The joint research involves the development of next generation soft x-ray (SXR) optical components and systems needed for such critical areas as SXR projection lithography, third-generation synchrotron radiation research, space platform telescopes and spectrometers, lithographic production of micro-machine parts, microscopy, and nonsynchrotron radiation SXR light sources. The project also involves Professor Howard Milchberg, University of Maryland, Professor John McNeil, University of New Mexico, and Japanese scientists at Tokyo University, Osaka University, and Tohoku University. The research deals with various problems associated with (1) optical and physical properties of new SXR optical materials (multilayers, etc.), (2) properties of new SXR optical devices (imaging and projection system, microscopes, telescopes, etc.), (3) evaluation and testing of SXR optical elements (aspheric surface figure, roughness, etc.), and (4) improvement to intense laboratory (non- synchrotron) SXR light sources. The U.S. and Japanese investigators' work is complementary and the joint research will provide a unique opportunity for mutually beneficial research. ***

9315132金特该奖项支持马里兰大学物理科学与技术研究所的马歇尔·金特教授和名古屋大学物理系的山下幸俊教授之间为期两年的合作研究项目。联合研究涉及开发下一代软X射线(SXR)光学元件和系统，这些光学元件和系统用于SXR投影光刻、第三代同步辐射研究、空间平台望远镜和光谱仪、微机械部件的光刻生产、显微镜和非同步辐射SXR光源等关键领域。该项目还包括马里兰大学的霍华德·米尔奇伯格教授、新墨西哥大学的约翰·麦克尼尔教授以及东京大学、大阪大学和东北大学的日本科学家。这项研究涉及的各种问题涉及(1)新的SXR光学材料(多层膜等)的光学和物理性质，(2)新的SXR光学器件的性质(成像和投影系统、显微镜、望远镜等)，(3)SXR光学元件的评估和测试(非球面形状、粗糙度等)，以及(4)对强实验室(非同步加速器)SXR光源的改进。美国和日本调查人员的工作是相辅相成的，联合研究将为互惠互利的研究提供独特的机会。***