Low Temperature Processing of Thin Film Superconductor for Microelectronic Applications

离子注入技术已应用于半导体工业。 薄膜陶瓷超导体有望与半导体集成，用于未来的微电子应用。 由于离子注入技术与目前的微电子技术相兼容，因此将离子注入技术应用于超导薄膜加工的前景是非常理想的。 迄今为止，利用离子注入进行超导处理的总体努力是相当有限的。 ***

9321232 Wang The technique of ion implantation has been utilized in the semiconductor industry. Thin film ceramic superconductors are expected to be integrated with semiconductors for future microelectronics applications. The prospect of having ion implantation for superconductor thin film processing would be extremely desirable, since it is compatible with present microelectronics technology. To date the overall effort on the utilization of ion implantation for superconductivity processing is quite limited. ***