Micro-Robot Manipulators-Complete Electromechanical Systems in a Cubic Centimeter

小行星9321718 本研究涉及的概念和技术的设计，制造和测试的一个家庭的多个自由度的机器人与工作量的范围从0.5毫米到0.5厘米的一侧的研究。 机器人将使用为微传感器行业和微机电系统研究开发的现有微机械加工技术制造。 机器人将作为完整的单元建造，所有的传感器，电机和机械装置都集成到同一个过程中。 不需要组装单独的组件。 这些机器人将能够达到亚微米的定位精度，这将通过使用机器人探测工作集成电路来证明。 机器人还将能够携带小型有效载荷，一侧约为半毫米，这将通过操纵激光二极管等小型光电元件来证明。 这项工作将立即应用于集成电路制造和测试，生物医学样品制备和分析，以及微米和亚微米尺度的材料处理和表征。

9321718 Pister This research involves the study of concepts and techniques for design, fabrication, and testing of a family of multiple degree of freedom robots with work volumes in a range from 0.5 millimeter to 0.5 centimeter on a side. The robots will be fabricated using existing micromachining technology developed for the micro sensor industry and micro electromechanical systems research. The robots will be built as complete units, with all of the sensors, motors, and mechanisms integrated into the same process. No assembly of separate components will be required. The robots will be capable of sub-micron positioning accuracy, which will be demonstrated by using a robot to probe a working integrated circuit. The robots will also be capable of carrying small payloads, on the order of one half of a millimeter on a side, which will be demonstrated by manipulation of small opto-electronics components such as laser diodes. This work will have immediate applications in integrated circuit manufacturing and testing, biomedical sample preparation and analysis, and material handling and characterization on a micron and submicron scale.