Micro-Robot Manipulators-Complete Electromechanical Systems in a Cubic Centimeter

9321718 Pister这项研究涉及设计、制造和测试一系列多自由度机器人的概念和技术，这些机器人的工作体积在0.5毫米到0.5厘米之间。这些机器人将使用现有的微加工技术制造，这些技术是为微传感器工业和微机电系统研究而开发的。这些机器人将作为一个完整的单元制造，所有的传感器、马达和机械装置都将集成到同一个过程中。不需要装配单独的部件。机器人将具有亚微米级的定位精度，这将通过使用机器人探测工作集成电路来证明。机器人还将能够携带小的有效载荷，每边约半毫米，这将通过操纵小型光电元件（如激光二极管）来证明。这项工作将立即应用于集成电路制造和测试，生物医学样品制备和分析，以及微米和亚微米尺度上的材料处理和表征。

9321718 Pister This research involves the study of concepts and techniques for design, fabrication, and testing of a family of multiple degree of freedom robots with work volumes in a range from 0.5 millimeter to 0.5 centimeter on a side. The robots will be fabricated using existing micromachining technology developed for the micro sensor industry and micro electromechanical systems research. The robots will be built as complete units, with all of the sensors, motors, and mechanisms integrated into the same process. No assembly of separate components will be required. The robots will be capable of sub-micron positioning accuracy, which will be demonstrated by using a robot to probe a working integrated circuit. The robots will also be capable of carrying small payloads, on the order of one half of a millimeter on a side, which will be demonstrated by manipulation of small opto-electronics components such as laser diodes. This work will have immediate applications in integrated circuit manufacturing and testing, biomedical sample preparation and analysis, and material handling and characterization on a micron and submicron scale.