Fabrication of Diffractive Optical Elements by Near-Field Optical Lithography

近场光学光刻法制造衍射光学元件

• 批准号: 9361263
• 负责人: John Bowen
• 金额: $ 6.5万
• 依托单位: Rochester Photonics Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-03-15 至 1995-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9361263&HistoricalAwards=false
• 关键词: Fabrication; Diffractive; Optical; Elements; Near

9361263 Bowen Several methods are currently being developed for the production of surface-relief diffractive optics including photolithography, single-point diamond turning, and single-point laserwriting. All of these methods are limited in either the achievable geometries or minimum feature size. In order to realize the full commercial potential of diffractive optics and subwavelength structured surfaces, it is necessary to create structures that consist of smaller features. We propose to investigate the use of near-field scanning optical lithography (NSOL) for the fabrication of diffractive structures that can be used at high numerical aperture and short wavelengths. Near-field scanning can create structures well below that produced by conventional projection lithography. In order to fabricate useful macroscopic optical devices, it is necessary to increase throughput and extend the manufacturable dimensions of NSOL. This capability will serve to advance optical technology in the areas of UV optical systems, optical data storage and subwavelength structured optics. The ability to fabricate nanometer-sized structures will also be useful for applications in X-ray instruments and micromachining. We have identified commercial applications in document security and polarization components. ***

目前正在开发几种用于生产表面浮雕衍射光学器件的方法，包括光刻、单点金刚石车削和单点激光书写。所有这些方法都受到可实现的几何形状或最小特征尺寸的限制。为了实现衍射光学和亚波长结构表面的全部商业潜力，有必要创建由较小特征组成的结构。我们建议研究使用近场扫描光学光刻（NSOL）来制造可用于高数值孔径和短波长的衍射结构。近场扫描产生的结构远低于传统投影光刻产生的结构。为了制造有用的宏观光学器件，有必要提高NSOL的吞吐量和扩大其可制造尺寸。这种能力将有助于推进紫外光学系统、光学数据存储和亚波长结构光学领域的光学技术。制造纳米级结构的能力也将在x射线仪器和微机械加工中得到应用。我们已经确定了在文档安全和极化组件中的商业应用。＊＊＊