Preparation and Characterization of Single Domain Epitaxial Electro-Optic Films

单畴外延电光薄膜的制备及表征

• 批准号: 9409964
• 负责人: Li Yan
• 金额: $ 4.99万
• 依托单位: University of Maryland Baltimore County
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-04-01 至 1996-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9409964&HistoricalAwards=false
• 关键词: Preparation; Characterization; Single; Domain; Epitaxial

9409964 Yan Preparation of expitaxial electro-optic thin films is the base for fabricating new integrated electro-optic and optoelectronic devices. To have good electro-optic performance, the films should be in a single domain structure, which can not be achieved automatically in the growth processes. This project is to study ways to prepare epitaxial electro-optic thin films with single crystal and single domain structure. LiTaO3 and LiNbO3 films with multilayer structure will be deposited by RF magnetron sputtering and laser ablation. The expitaxial LiTaO3 and LiNbO3 films will be poled by an electric field after the deposition process. The electro-optic coefficients of the poled epitaxial LiTaO3 and LiNbO3 film waveguides will be measured and the correlation with the poling conditions will be studied. The objectives are to successfully prepare single domain epitaxial LiTaO3 and LiNbO3 film waveguides with good electro-optic property and to understand the basic process. ***

9409964 Yen外延电光薄膜的制备是制备新型集成电光和光电子器件的基础。要想获得良好的电光性能，薄膜必须是单一的磁畴结构，而不是在生长过程中自动实现的。本项目旨在研究制备单晶、单畴结构的外延电光薄膜的方法。采用射频磁控溅射和激光烧蚀方法制备了具有多层结构的LiTaO_3和LiNbO_3薄膜。外延的LiTaO_3和LiNbO_3薄膜在沉积过程中会被电场极化。测量了极化外延LiTaO_3和LiNbO_3薄膜光波导的电光系数，并研究了它们与极化条件的关系。我们的目标是成功地制备出具有良好电光性能的单域外延LiTaO_3和LiNbO_3薄膜光波导，并了解其基本工艺。***