Energy Filtered Detector for Micro-Diffracton in the Scanning Electron Microscope

扫描电子显微镜中微衍射能量过滤探测器

• 批准号: 9411850
• 负责人: James Mancuso
• 金额: $ 13.04万
• 依托单位: Advanced Microscopy Techniques
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-07-01 至 1997-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9411850&HistoricalAwards=false
• 关键词: Energy; Filtered; Detector; Micro; Diffracton

*** 9411850 MANCUSO SBIR Phase-II funds are provided to investigators at Advanced Microscopy Techniques to develop an energy filter for electron backscatting patterns (EBSP) with fine pattern resolution and a large acceptance angel. The Phase-II research objectives are: 1) to develop an energy filter and EBSP sensor element that retains high quality micro-diffraction patterns with improved contract due to energy filtering, and 2) maintain a large acceptance angel for the microdiffraction patterns. If these improvements can be made, two major advances would be possible. First, the visibility of the diffraction pattern would improve for both direct viewing and for digital acquisition and analysis. This would extend EBSP ( and consequently SEM) to a greater variety of applications and materials. Second, the new device could serve a dual purpose as both an EBXP detector and a small angle (dark field) detector. Thus, both quantitative analysis of diffraction patterns and qualitative diffraction imaging are available to the materials researcher. The success of this research will lead to a Phase-III program to develop a system that can be used in basic research, materials design and manufacturing support. The technique can be adapted to both new electron microscopes and the large existing base of SEMs - allowing the fullest use of SEM technology in materials characterization. ***

*** 9411850 MANDIO SBIR第二阶段资金提供给高级显微技术的研究人员，以开发具有精细图案分辨率和大接受角的电子背散射图案（EBSP）的能量过滤器。 第二阶段的研究目标是：1）开发一种能量过滤器和EBSP传感器元件，该元件保持高质量的微衍射图案，由于能量过滤而具有改进的收缩，以及2）保持微衍射图案的大接受角。 如果这些改进能够实现，将有可能取得两项重大进展。 首先，衍射图案的可见性将改善用于直接观察和用于数字采集和分析。 这将使EBSP（以及随后的SEM）扩展到更多种类的应用和材料。 其次，新设备可以用作EBXP探测器和小角度（暗场）探测器的双重用途。 因此，无论是定量分析的衍射图案和定性的衍射成像材料研究人员。 这项研究的成功将导致第三阶段计划，以开发一个可用于基础研究，材料设计和制造支持的系统。 该技术可以适应新的电子显微镜和现有的大型SEM基础-允许在材料表征中充分使用SEM技术。 ***