Acquisition of a Low-Energy Electron Microscope

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A low-energy electron microscope (LEEM) will be acquired with funds from the Academic Research Infrastructure Program. The state-of-the-art LEEM will be obtained from IBM where it has been developed in-house by R. Tromp. Currently there are only a small number of LEEMs in the entire world and there are large numbers of scientific applications to be exploited. The program will also include some development by combining scanning tunneling microscopy (STM) with LEEM and also by combining a novel optical probe using guided-wave optical spectroscopy with LEEM. The research will involve epitaxial growth processes and growth optimization of semiconductor films. Materials systems to be studied include silicon, silicon-germanium and group III- nitrides. An effort will be made to combine supersonic jet deposition with LEEM. Using a relatively new electron spectroscopy, namely low-energy electron microscopy, studies will be made of the epitaxial growth process and growth optimization. The research will focus on silicon, silicon-germanium and group III-nitrides. Collaborative efforts with IBM will be initiated to develop new capabilities for this relatively new electron microscopy technique.