Fracture and Fatigue of Micro Electromechanical Systems

微机电系统的断裂与疲劳

• 批准号: 9416752
• 负责人: Robert Mullen
• 金额: $ 29.3万
• 依托单位: Case Western Reserve University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-11-01 至 1998-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9416752&HistoricalAwards=false
• 关键词: Fracture; Fatigue; Micro; Electromechanical; Systems

9416752 Mullen This research is intended to advance the understanding of the mechanical behavior of silicon at the micro- and nano-scale levels in order to improve the mechanical reliability of microelectromechanical systems (MEMS). The proposed research seeks to provide a sound fracture mechanics base for polysilicon MEMS devices and a sound materials science base relating processing parameters to polysilicon microstructures and polysilicon microstructures to mechanical behavior. The overall aim is to understand and significantly improve the mechanical reliability of polysilicon MEMS devices by combining the research expertise of applied mechanicians, materials scientists and electrical engineers. This synergistic collaboration will lead to new knowledge that will significantly improve the design, fabrication and utility of MEMS devices. ***

9416752马伦这项研究的目的是推进硅在微米和纳米尺度水平的机械行为的理解，以提高微机电系统（MEMS）的机械可靠性。 拟议的研究旨在为多晶硅MEMS器件提供一个良好的断裂力学基础，并将工艺参数与多晶硅微结构和多晶硅微结构与机械行为联系起来。 总体目标是通过结合应用机械师，材料科学家和电气工程师的研究专业知识，了解并显着提高多晶硅MEMS器件的机械可靠性。 这种协同合作将带来新的知识，将显着改善MEMS器件的设计，制造和实用性。 ***