Fracture and Fatigue of Micro Electromechanical Systems

9416752马伦这项研究旨在促进在微米和纳米尺度上对硅的机械行为的理解，以提高微电子机械系统的机械可靠性。这项研究旨在为多晶硅MEMS器件提供良好的断裂力学基础，以及将多晶硅微结构的工艺参数和多晶硅微结构的力学行为联系起来的良好的材料科学基础。总体目标是通过结合应用机械师、材料科学家和电气工程师的研究专业知识，了解并显著提高多晶硅MEMS器件的机械可靠性。这种协同合作将带来新的知识，将显著改进MEMS器件的设计、制造和实用。***

9416752 Mullen This research is intended to advance the understanding of the mechanical behavior of silicon at the micro- and nano-scale levels in order to improve the mechanical reliability of microelectromechanical systems (MEMS). The proposed research seeks to provide a sound fracture mechanics base for polysilicon MEMS devices and a sound materials science base relating processing parameters to polysilicon microstructures and polysilicon microstructures to mechanical behavior. The overall aim is to understand and significantly improve the mechanical reliability of polysilicon MEMS devices by combining the research expertise of applied mechanicians, materials scientists and electrical engineers. This synergistic collaboration will lead to new knowledge that will significantly improve the design, fabrication and utility of MEMS devices. ***