NSF Young Investigator

NSF 青年研究员

• 批准号: 9457758
• 负责人: Eray Aydil
• 金额: $ 31.25万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-08-15 至 2000-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9457758&HistoricalAwards=false
• 关键词: NSF; Young; Investigator

9457758 Aydil Chemically reactive gas plasma, used in microelectronics processing, will be studied. The objective of this research is to understand how the process conditions dictate the properties of the plasmas, the transport phenomena and gas phase and surface kinetics, which in turn affect the properties of the materials processed. The research is organized along two lines: developing and improving new experimental plasma and surface diagnostic techniques that give fundamental information on the surface and gas phase chemistry, and using these techniques to study and manipulate processing conditions and engineering designs in order to produce materials with desired properties in applications such as plasma-enhanced chemical vapor deposition. ***

9457758 Aydil化学反应气体等离子体，用于微电子加工，将进行研究。 本研究的目的是了解工艺条件如何决定等离子体的性质，传输现象以及气相和表面动力学，这反过来又影响所加工材料的性质。 该研究是组织沿着两条线：开发和改进新的实验等离子体和表面诊断技术，使表面和气相化学的基本信息，并使用这些技术来研究和操纵加工条件和工程设计，以生产材料所需的性能，如等离子体增强化学气相沉积的应用。 ***