Supersonic Nozzle Beam Source of Active Nitrogen for Improved Nitride Growth

用于改善氮化物生长的超音速喷嘴活性氮束源

• 批准号: 9460468
• 负责人: Andrew Freedman
• 金额: $ 6.5万
• 依托单位: Aerodyne Research Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-02-01 至 1995-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9460468&HistoricalAwards=false
• 关键词: Supersonic; Nozzle; Beam; Source; Active

This Small Business Innovation Research Phase I project involves the development of a supersonic nozzle beam source of 'active nitrogen' to be used in the molecular beam epitaxy (MBE) of nitride materials. The approach involves 'seeding' a heavy (and relatively inert) nitrogen precursor gas in a light carrier gas and using supersonic expansion to accelerate the precursor molecules towards the substrate surface with an energy sufficient to cause bond dissociation. The resultant species would be a free radical and thus, highly reactive. Further variation of the translational kinetic energy of the nitrogen precursor species by use of different seeding gases will enhance the mobility of the metal and N species necessary to produce Group III nitride monocrystalline thin films with limited defects. This project represents a joint effort of Aerodyne Research, Inc. in collaboration with the Material Science and Engineering Department at North Carolina State University.

这个小企业创新研究第一阶段项目涉及开发一种用于氮化物材料分子束外延（MBE）的“活性氮”超音速喷嘴束源。该方法涉及在轻载气中“播种”重（且相对惰性）氮前体气体，并使用超声膨胀以足以引起键解离的能量加速前体分子朝向衬底表面。所产生的物质将是自由基，因此具有高度反应性。通过使用不同的引晶气体进一步改变氮前体物质的平移动能将增强产生具有有限缺陷的III族氮化物单晶薄膜所需的金属和N物质的迁移率。该项目代表了Aerodyne Research，Inc.与北卡罗来纳州州立大学材料科学与工程系合作。