Role of Defects in Chemical Vapor Deposition Diamond and Related Phases

缺陷在化学气相沉积金刚石及相关相中的作用

• 批准号: 9522566
• 负责人: Andrzej Badzian
• 金额: $ 27.91万
• 依托单位: Pennsylvania State Univ University Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-09-01 至 1999-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9522566&HistoricalAwards=false
• 关键词: Role; Defects; Chemical; Vapor; Deposition

9522566 Badzian This research project aims for fundamental understanding of diamond films formed by chemical vapor depostion(CVD), and approaches this goal through the hypothesis that defects in CVD diamond may be due to stacking faults within sp3-bonded carbon rather than arising from sp2 hybridization. Studies will be conducted to determine the atomic structure of tetrahedral forms of carbon, different than cubic and hexagonal, using microwave plasma chemical vapor deposition. Additives to the methane-hydrogen plasma, such as B, N, O, Si, Ni, Ti, will be used to influence reaction pathways on the growing diamond surface, and to modify the crystalline structure during growth. Atomic resolution structure of diamond surfaces will be studied by scanning tunneling microscopy, reflection high and low energy electron diffraction; other materials characterization techniques include Raman spectroscopy, X-ray diffuse scattering, photoluminescence, XPS and Auger spectroscopy. Cold neutron depth profiling will be done in collaboration with NIST. %%% This project will be important to the utilization of the unique electronic, thermal, and mechanical properties of diamond films through improved basic understanding of their crystalline structure, and the relationships gained between structure, properties, and processing. An important feature of the program is the training of students in a fundamentally and technologically significant area. ***

本研究项目旨在对化学气相沉积（CVD）形成的金刚石薄膜有一个基本的认识，并通过假设CVD金刚石中的缺陷可能是由于sp3键合碳内部的层错而不是由sp2杂化引起的。利用微波等离子体化学气相沉积技术，确定不同于立方和六边形的四面体碳的原子结构。在甲烷氢等离子体中加入B、N、O、Si、Ni、Ti等添加剂，以影响生长金刚石表面的反应途径，并在生长过程中改变晶体结构。利用扫描隧道显微镜、反射高能和低能电子衍射研究金刚石表面的原子分辨结构；其他材料表征技术包括拉曼光谱，x射线漫射散射，光致发光，XPS和俄歇光谱。冷中子深度剖面将与NIST合作完成。通过提高对金刚石薄膜晶体结构的基本理解，以及结构、性能和加工之间的关系，该项目将对利用金刚石薄膜独特的电子、热学和机械性能具有重要意义。该计划的一个重要特点是在一个基础和技术上重要的领域培养学生。＊＊＊