The Application of Compliant Mechanism Theory to the Design of Complex MEMS Devices

该提案描述了微电子系统（MEMS）的研究，特别强调开发一种方法来执行复杂MEMS系统的计算机模拟。本研究的目的是探讨MEMS广义投诉机制设计理论的应用概念。其基本思想是开发一种“计算紧凑”的方法，利用投诉机制理论对MEMS结构进行建模，以简化MEMS结构的描述。这个想法与现有的几种方法相反：(1)需要大量计算时间的有限元技术和(2)基于线性系统假设的固体力学方程方法。在投诉机制方法中，构造了一个伪刚体模型，以紧凑的形式体现了系统的非线性特征。本文通过实验验证了柔性机理理论，并制作了MEMS测试结构。这些结构将使用杨百翰大学和MCNC的3多晶硅微加工工艺。一个简化的理论，允许微机电系统的设计将是非常重要的科学和工程界在这些领域的工作。＊＊＊

9528238 Howell This proposal describes research in Microelectronical Systems (MEMS) with particular emphasis on the development of an approach to perform computer simulation of complex MEMS systems. The object of the research is to investigate the concept of applying a generalized complaint mechanism design theory of MEMS. The basic idea is to develop a "computationally compact" method to model MEMS structures using the theory of complaint mechanisms to simplify the description of MEMS structures. The idea is in contrast to several existing approaches: (1) a finite-element technique which requires extensive computation time and (2) a solid-mechanics equation method based upon the assumption of linear systems. In the complaint mechanism approach a pseudo-rigid body model is constructed which embodies the nonlinear features of the system in a compact formalism. In this proposal the compliant mechanism theory is verified experimentally with the fabrication of test MEMS structures. These structures will use a 3 polysilicon process with micromachining at Brigham Young University and MCNC. A simplified theory which allows the design of MEMS will be of great importance to the scientific and engineering community working in these areas. ***