Bistable Micro Mechanisms

杨百翰大学提案编号9978737双稳态微机械摘要：微电子机械系统中的许多关键应用要求某些元件能够位于两个或多个不同的和可预测的位置。实例包括电继电器和开关、微流体阀、微流体泵、液压滑阀、光学阵列的微定位以及用于光纤电路或其他应用的机械开关。目前，在这种应用中使用的大多数设备具有处于一种状态的静止位置，从而必须连续地向该设备供电以保持第二位置。这些方法对能量的高要求限制了它们在大型自主MEMS器件和阵列中的实用性。双稳态器件提供了一种创新的替代方案，因为它们有两个稳定的平衡位置。只有在从一个稳定的平衡位置到另一个稳定的平衡位置的转变过程中，才需要向系统输入能量。这对必须携带自己的电源的自主系统和必须将热量降至最低的设备都很重要。双稳态机制的其他主要优势包括，无论输入电源的状态如何，都能够在较长时间内保持状态(这对于非易失性存储器和其他应用很重要)，以及提高微型设备定位的精确度和精确度。柔顺机构理论为在微观层面上设计成功的双稳态机构提供了手段。许多MEMS已经使用了柔性和其他简单的柔顺元件，但柔顺机构理论使复杂得多的机械运动成为可能。由于运动和能量存储集成在顺应性机构中，因此它们是双稳态设备的理想选择。所提出的方法包括以下步骤：双稳态结构识别；建模、分析和设计；驱动；制造和测试。

Larry L. Howell, Brigham Young University Proposal Number 9978737 Bistable Micro Mechanisms Abstract: Many critical applications in microelectromechanical systems (MEMS) require that certain components be capable of being in two or more distinct and predictable positions. Examples include electrical relays and switches, microfluidic valves, microfluidic pumps, hydraulic spool valves, micro positioning of optical arrays, and mechanical switches for fiber optic circuits or other applications. Currently, most devices used in such applications have the rest position at one state such that power must be continuously supplied to the device to maintain the second position. The high energy requirements of these methods limit their practicality for large autonomous MEMS devices and arrays. Bistable devices offer an innovative alternative because they have two stable equilibrium positions. Energy input to the system is required only during the transition from one stable equilibrium position to the other. This is important for both autonomous systems that must carry their own power supply and for devices where heat must be minimized. Other major advantages of bistable mechanisms include the ability to maintain state for extended periods regardless of the status of the input power source (this is important for nonvolatile memory and other applications), and increased accuracy and precision in positioning of micro devices. Compliant mechanism theory offers the means to design successful bistable mechanisms at the micro level. Many MEMS already use flexures and other simple compliant components, but compliant mechanism theory makes possible much more complex mechanical motion. Because motion and energy storage are integrated in compliant mechanisms, they are ideal for bistable devices. The proposed approach includes the following: bistable configuration identification; modeling, analysis, and design; actuation; fabrication and testing.