Micromachined VHF to UHF Mechanical Resonators for Communications Applications

用于通信应用的微机械 VHF 至 UHF 机械谐振器

• 批准号: 9530190
• 负责人: Clark Nguyen
• 金额: $ 29万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-05-01 至 2000-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9530190&HistoricalAwards=false
• 关键词: Micromachined; VHF; UHF; Mechanical; Resonators

9530190 Nguyen This program extends the frequency of oscillation for micromechanical resonators to the VHF, UHF and S bands for application in wireless communication networks. Investigations will be conducted into material properties, mechanical design, circuit modeling, transducer design, fabrication, and electrical evaluation of the resonators. In order to extend the range of frequencies the resonators require nano-scale electrode-to-resonator gaps. This research will examine the influence of scaling on thermal and phase noise, the need to integrate peripheral circuits on the same substrate as the resonators, new design methodologies and a study of the performance parameters including reliability considerations. In particular, the research will focus on those loss mechanisms which limit the achievable quality factor, Q, of high frequency micromechanical resonators. the ultimate objective of this research is to realize single-chip transceivers based upon microelectromechanical (MEMS) signal processors. ***

9530190 Nguyen该计划将微机械谐振器的振荡频率扩展到VHF，UHF和S波段，用于无线通信网络。 调查将进行到材料特性，机械设计，电路建模，换能器设计，制造和谐振器的电气评估。 为了扩展频率范围，谐振器需要纳米级电极到谐振器间隙。 本研究将探讨缩放对热噪声和相位噪声的影响，需要集成在同一基板上的谐振器，新的设计方法和性能参数，包括可靠性考虑的研究外围电路。 特别是，研究将集中在那些限制可实现的品质因数，Q值，高频微机械谐振器的损耗机制。 本研究的最终目标是实现基于微机电（MEMS）信号处理器的单片收发器。 ***