Micromachined VHF to UHF Mechanical Resonators for Communications Applications

9530190元此程序将微机械谐振器的振荡频率扩展到甚高频、特高频和S频段，用于无线通信网络。将对谐振器的材料特性、机械设计、电路建模、换能器设计、制造和电气评估进行调查。为了扩大频率范围，谐振器需要纳米级的电极到谐振器的间隙。这项研究将考察定标对热噪声和相位噪声的影响，是否需要将外围电路集成到与谐振器相同的基板上，新的设计方法以及包括可靠性考虑在内的性能参数研究。特别是，研究将集中在限制高频微机械谐振器可实现的品质因数Q的那些损耗机制上。本研究的最终目标是实现基于微电子机械(MEMS)信号处理器的单片收发信机。***

9530190 Nguyen This program extends the frequency of oscillation for micromechanical resonators to the VHF, UHF and S bands for application in wireless communication networks. Investigations will be conducted into material properties, mechanical design, circuit modeling, transducer design, fabrication, and electrical evaluation of the resonators. In order to extend the range of frequencies the resonators require nano-scale electrode-to-resonator gaps. This research will examine the influence of scaling on thermal and phase noise, the need to integrate peripheral circuits on the same substrate as the resonators, new design methodologies and a study of the performance parameters including reliability considerations. In particular, the research will focus on those loss mechanisms which limit the achievable quality factor, Q, of high frequency micromechanical resonators. the ultimate objective of this research is to realize single-chip transceivers based upon microelectromechanical (MEMS) signal processors. ***