Ultra-Low Noise Mechanical Frequency-Divided MEMS-Based Oscillator

基于 MEMS 的超低噪声机械分频振荡器

• 批准号: 1809319
• 负责人: Clark Nguyen
• 金额: $ 36万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2018
• 资助国家: 美国
• 起止时间: 2018-06-01 至 2021-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1809319&HistoricalAwards=false
• 关键词: Ultra; Low; Noise; Mechanical; Frequency

This research program aims to harness new capabilities in miniature mechanics that enable portable personal radar with resolution commensurate with much larger radars used on demanding platforms, such as planes, boats, and tracking systems. Here, because the resolution of any radar depends heavily on the stability of its interrogating signal, the quality of the internal oscillator that generates this signal is among the most important determinants of radar performance. It is for this reason that the most capable radars use frequency signal generators based on 'Poseidon' oscillators that derive their stability from bulky (and expensive) sapphire-loaded cavity resonators. However, the size and cost of this approach restricts it to use in large non-portable applications. The research herein breaks this paradigm by recognizing that an oscillator referenced to an ensemble of tiny mechanically resonant structures constructed in diamond material can potentially equal and perhaps outperform a Poseidon oscillator, all in a substantially smaller form factor. Indeed, sizes small enough to enable high-resolution personal radar might be within reach, and this could enable a host of new personal capabilities, including ranging, remote location services, and local area sensing to identify opportunities, e.g., sales on interesting items, favorite foods, etc., as one walks past them.The research specifically explores parametric mechanical frequency division using micromechanical resonators and sub-20-nanometer electrode-to-resonator gaps that together propel the short-term stability and figure-of-merit of oscillators towards that of the best radar oscillators, but in substantially smaller size. Here, tiny electrode-to-resonator gaps enabled by advances in nanofabrication technology increase the electromechanical coupling of capacitive-gap transduced micromechanical resonators to ranges that support gigaHertz oscillators, all while retaining their record-setting quality factors, both of which drive down phase noise and power consumption. Sub-20-nanometer gaps also permit wider frequency tuning, as well as the use of parametric excitation at higher resonance frequencies, which in turn enables mechanical approaches to reducing phase noise further via a combination of frequency division and close-to-carrier filtering, all with nearly no power penalty. While gap reduction enables unprecedented micromechanical resonator and oscillator performance, it also elucidates fundamental physical limitations expected to manifest more prominently at the nano-scale, including nonlinear noise multiplication, undue injection locking, Casimir forces, enhanced (unwanted) acceleration sensitivity, and less resilience against finite fabrication tolerances and stress. While possibly detrimental to performance, these physical limitations open fertile ground for scientific study. Indeed, lessons learned by modeling the influence of nonlinearity on oscillator limiting and phase noise are likely key to propelling micromechanical oscillators into the stated higher end applications.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

这项研究计划旨在利用微型机械的新能力，使便携式个人雷达具有与要求苛刻的平台(如飞机、船只和跟踪系统)上使用的更大雷达相称的分辨率。在这里，由于任何雷达的分辨率在很大程度上取决于其询问信号的稳定性，所以产生该信号的内部振荡器的质量是决定雷达性能的最重要因素之一。正是出于这个原因，最有能力的雷达使用基于‘定海神号’振荡器的频率信号发生器，这种振荡器的稳定性来自体积庞大(且昂贵)的蓝宝石加载的腔体谐振器。然而，这种方法的大小和成本限制了它在大型非便携应用程序中的使用。这里的研究打破了这一范式，因为它认识到，振荡器指的是用钻石材料建造的微小机械共振结构的集合，它可能与海神振荡器等同，甚至可能性能优于海神振荡器，所有这些都具有更小的外形系数。事实上，足够小到能够实现高分辨率个人雷达的尺寸可能是触手可及的，这可以使一系列新的个人能力，包括测距、远程定位服务和局域传感，在人们经过它们时识别机会，例如，有趣的商品、最喜欢的食物等。研究特别探索了使用微机械谐振器和亚20纳米电极到谐振器的间隙的参数机械分频，这些共同推动振荡器的短期稳定性和优点系数接近最好的雷达振荡器，但体积要小得多。在这里，由于纳米制造技术的进步，微小的电极到谐振器间隙将电容间隙传感器微机械谐振器的机电耦合提高到支持千兆赫振荡器的范围，同时保持其创纪录的品质因数，这两者都降低了相位噪声和功耗。低于20纳米的间隙还允许更宽的频率调谐，以及在更高的共振频率下使用参数激励，这反过来又使机械方法能够通过分频和近载波滤波的组合进一步降低相位噪声，所有这些都几乎没有功率损失。虽然间隙减小能够实现前所未有的微机械谐振器和振荡器的性能，但它也阐明了预计将在纳米级更加突出的基本物理限制，包括非线性噪声倍增、过度注入锁定、Casimir力、增强的(不需要的)加速度灵敏度以及对有限制造公差和应力的弹性降低。虽然这些身体限制可能不利于表现，但却为科学研究提供了肥沃的土壤。事实上，通过建模非线性对振荡器限制和相位噪声的影响所获得的经验教训可能是推动微机械振荡器进入所述高端应用的关键。该奖项反映了NSF的法定使命，并通过使用基金会的智力优势和更广泛的影响审查标准进行评估，被认为值得支持。

项目成果

A Parametric MEMS Oscillator-Based Super-Regenerative Receiver Front-End

基于参数 MEMS 振荡器的超再生接收器前端

• DOI: 10.1109/fcs.2019.8856028
• 发表时间: 2019
• 期刊: 2019 IEEE International Frequency Control Symposium
• 作者: Peleaux, Kieran A.;Nguyen, Thanh-Phong K.;Anton, Alain;Ren, Zeying;Nguyen, Clark T.-C.
• 通讯作者: Nguyen, Clark T.-C.

On-Chip Precision Residual Strain Diagnostic Based on Gap-Dependent Electrical Stiffness

基于间隙相关电刚度的片上精密残余应变诊断

• DOI: 10.1109/transducers.2019.8808299
• 发表时间: 2019
• 期刊: Transducers 2019
• 作者: Ozgurluk, Alper;Nguyen, Clark T.-C.
• 通讯作者: Nguyen, Clark T.-C.

Performance Enhancement and Restoration of Micromechanical Resonators Via UV-Ozone Treatment

通过紫外线臭氧处理增强和恢复微机械谐振器的性能

• DOI: 10.1109/mems51782.2021.9375184
• 发表时间: 2021
• 期刊: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS
• 作者: Xie, Qianyi;Afshar, Sherwin A.;Ozgurluk, Alper;Nguyen, Clark T.-C.
• 通讯作者: Nguyen, Clark T.-C.

Low-Power MEMS-Based Pierce Oscillator Using a 61-MHz Capacitive-Gap Disk Resonator

• DOI: 10.1109/tuffc.2020.2969530
• 发表时间: 2020-07-01
• 期刊: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
• 影响因子: 3.6
• 作者: Naing, Thura Lin;Rocheleau, Tristan O.;Nguyen, Clark T. -C.
• 通讯作者: Nguyen, Clark T. -C.

Single-Digit-Nanometer Capacitive-Gap Transduced Micromechanical Disk Resonators

• DOI: 10.1109/mems46641.2020.9056204
• 发表时间: 2020-01
• 期刊: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
• 作者: A. Ozgurluk;Kieran Peleaux;C. Nguyen