Equipment for a Laboratory Course on Mechanical Reliability of Microelectronic Devices

微电子器件机械可靠性实验课程设备

• 批准号: 9551029
• 负责人: jianmin qu
• 金额: $ 2.93万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-05-01 至 1997-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9551029&HistoricalAwards=false
• 关键词: Equipment; Laboratory; Course; Mechanical; Reliability

Semiconductor device technology is going through rapid changes in order to achieve ultra-large-scale integration. The increasing demand for more complex chip functionality and higher speed have led to decreasing device feature size. Development of new concepts and theories of mechanical reliability of microelectronic devices has been an emerging interdisciplinary subject because of the continual downsizing of the microelectronics devices. This project funds equipment for a laboratopy course on Mechanical Reliability of Microelectronics to be offered to upper-division engineering undergraduate students at Georgia Tech. The objectives of offering such a course to mechanical engineering students are (1) to introduce them to the field of mechanical reliability of microelectronics, (2) to make them aware that there is an urgent need in the electronic industry for mechanical engineers in packaging, and (3) to give them a head start in their engineering careers so they can face technological challenges in the 21st century. The new equipment includes a microtester system and an optical microscopy system.

为了实现超大规模集成，半导体器件技术正在经历着日新月异的变化。对更复杂的芯片功能和更高速度的需求不断增加，导致了设备特征尺寸的减小。随着微电子器件尺寸的不断缩小，发展微电子器件机械可靠性的新概念和新理论已成为一门新兴的交叉学科。该项目为佐治亚理工学院高级工科本科生开设的微电子机械可靠性实验课程提供设备。为机械工程专业学生开设这样一门课程的目的是(1)向他们介绍微电子机械可靠性领域，(2)让他们意识到电子行业迫切需要封装机械工程师，以及(3)让他们在工程职业生涯中领先一步，以便他们能够面对21世纪的技术挑战。新设备包括微型测试仪系统和光学显微镜系统。