SBIR PHASE I: Integrated Motoring and Magnetic Suspension System

这个小型企业创新研究（SBIR）第一阶段项目将探索使用先进的电磁悬浮和驱动技术，以改善快速热处理（RTP）过程中的硅片处理。 目前的晶片RTP处理由于滚珠轴承故障和磨损而导致晶片损失和设备停机时间而产生大量成本。 除了改进的RTP设备，晶圆加工设备的制造商还需要先进的设施，这将使滚动轴承技术过时。 预计在更高的旋转速率和更大直径的晶片方面将取得进展。 磁悬浮和驱动技术看起来很有希望在RTP中使用的高温腐蚀性气氛（氟，氯，HCl）中支撑和旋转晶片。 第一阶段将结合联合收割机的设计、分析、原型试验和成本/单位成本的权衡，以证明其可行性，并为RTP设施的综合电动机和磁悬浮系统（IMMSS）提出一个具有成本竞争力的概念设计。 第二阶段将对原型进行评价。 磁悬浮和致动技术最终可应用于集成电路制造中的广泛的材料处理问题，这些问题需要精确定位;没有静摩擦;没有磨损颗粒产生;以及暴露于真空、腐蚀性或高温环境。

This Small Business Innovation Research (SBIR) Phase I project will explore the use of advanced electromagnetic suspension and actuation technology to improve silicon wafer handling during Rapid Thermal Processing (RTP). Current wafer RTP processing incurs substantial cost from lost wafers and facility downtime due to ball bearing failure and wear. In addition to improved RTP equipment, manufacturers of wafer processing equipment need advanced facilities, which will make rolling element bearing technology obsolescent. Advances are expected in higher rotation rates and larger diameter wafers. Magnetic suspension and actuation technology looks promising for supporting and rotating a wafer in the high temperature corrosive atmosphere (fluorine, chlorine, HCl) used in RTP. Phase I will combine design, analysis, prototype testing, and cost/per-formance trade-offs to demonstrate feasibility and to produce a cost competitive conceptual design for an integrated motoring and magnetic suspension system (IMMSS) for RTP facilities. A prototype would be evaluated Phase II. Magnetic suspension and actuation technology is ultimately applicable to a wide range of material handling problems in integrated circuit manufacture which require precise positioning; the absence of stiction; the absence of wear particle generation; and exposure to vacuum, corrosive, or high temperature environments.