Mass Spectrometer for Radical Species Detection During CVD of Cubic Boron-Nitride and Diamond

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Abstract Cappelli CTS-9622042 The PI proposes to purchase a molecular beam mass spectrometer (MBMS) system for-near surface radical species detection during chemical vapor deposition (CVD) growth taking place in a variety of systems currently being investigated. These systems include films of diamond, diamond-like carbon (DLC), cubic boron nitride and carbon nitride. The addition of this instrumentation to the PI's laboratory would allow him to perform a compositional and energy analysis of the impinging plasma (including ions and radicals) in order to help develop a detailed mechanistic understanding of the deposition process including the effects of ion interactions with the growth surface, and the validation of gas phase radical transport models.