Research Equipment Grant: High-Resolution Mask Aligner

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9622716 Botez The Department of Electrical and Computer Engineering at the University of Wisconsin-Madison will purchase a high-resolution (0.4um) mask aligner equipped with backside illumination, which will be dedicated to support research in engineering. The equipment will be used for several research projects, including in particular: high-index-step phase-locked arrays of antiguided diode lasers; monolithically integrated flared-antiguided master oscillator power amplifiers; novel micromachined millimeter-wave antennas and circuits; micromachined devices; and superconducting vortex flow transistors fabricated in high-temperature superconducting thin films. ***