SBIR Phase II: Infrared Detectors Using Micro-Cantilevers

9627174亨特这个小企业创新研究第二阶段项目将导致利用微悬臂梁技术的最新发展的新型红外探测器的发展。 这样的器件可以使用标准的半导体制造方法大规模生产，并且使用微机械加工技术专门针对我们的特定应用进行定制。 在该项目的第一阶段，一个工作的实验室版本的温度和IR传感器的构建和测试使用光学和压阻技术来测量由于热应力引起的悬臂弯曲。 压阻技术被证明有一个数量级更高的灵敏度检测光辐射比光学传感技术，并随之而来的校准和电子放大的要求，需要优化输出响应的传感器是相当简单的比那些光学检测技术。 在该项目的第二阶段，将使用压阻技术优化红外温度传感器的性能，并将建造该仪器的各种工程原型。 第三阶段将通过制造和销售专门为特定红外传感和温度测量应用设计的各种独立仪器来实现这项技术的商业化。 基于微悬臂梁的红外探测器的商业应用是众多的，因为这些探测器非常灵敏，容易小型化，并且可以容易地大规模生产。 医疗应用包括非接触式测温和用于癌症检测的全身热成像。 高灵敏度温度测量和红外成像能力在航空航天工业、军事以及夜视和安全应用中是必需的。 制造业和机器中的温度控制也是可能的应用。

9627174 Hunter This Small Business Innovation Research Phase II project will result in the development of new types of infrared detectors utilizing very recent developments in microcantilever technology. Such devices can be mass produced using standard semiconductor manufacturing methods, and specially tailored to our particular application using micromachining techniques. During Phase I of this project, a working laboratory version of a temperature and IR sensor was constructed and tested using both optical and piezoresistive techniques to measure the cantilever bending due to thermal induced stress. The piezoresistive technique was shown to have an order of magnitude higher sensitivity for detecting optical radiation than the optical sensing technique, and the attendant alignment and electronic amplification requirements needed to optimize the output response from the sensor were considerably simpler than those for the optical detection technique. During Phase II of the project the performance of the infrared temperature sensor will be optimized using the piezoresistive technique and various engineering prototypes of this instrument will be built. Phase III will involve commercialization of this technology through fabrication and sales of various stand-alone instruments specifically designed for given IR sensing and temperature measurement applications. Commercial applications of infrared detectors based on microcantilevers are numerous since these detectors are extremely sensitive, easily miniaturized, and can be readily mass produced. Medical applications include non contact thermometry and whole body thermal imaging for cancer detection. High sensitivity temperature measurement and IR imaging capabilities are required in the aerospace industry, military, and for night vision and security applications. Temperature control in manufacturing and machines also are possible applications.