The Atomic Force Microscope as a Machine Tool: Modelling, Robust Control Design, and Hardware

原子力显微镜作为机床：建模、鲁棒控制设计和硬件

• 批准号: 9632820
• 负责人: Mohammed Dahleh
• 金额: $ 25.82万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-15 至 2000-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9632820&HistoricalAwards=false
• 关键词: Atomic; Force; Microscope; Machine; Tool

9632820 Dahleh Precision machining is an important emerging technology with manufacturing applications in diverse fields such as optics, microelectronics, magnetic and optical recording as well as sensors and actuators. With trends in miniaturization, the need to develop tools to shape materials as micrometer and nanometer scales is expected to keep increasing. In view of this, we propose to design, fabricate and use a machine tool which is based on the concept of the atomic force microscope (AFM). The AFM is a recent invention which has so far been used to image surfaces with atomic scale lateral and vertical resolution. It scans a sharp stylus probe across a sample surface while maintaining a constant contact force between the probe tip and the sample surface through a feedback control system. We propose to use the stylus probe as a cutting tool with the system having the following features--(1) depths-of-cut will range from 1nm - 10um with surface finishes ranging from 0.1 nm -1 nm; (2) normal and tangential forces on the tool will be simultaneously measured with 10 nN to 1 uN resolution; (3) tool-workpiece relative motion can be rotational and/or translational; (4) closed loop robust control will maintain constant either the tool-sample force or the tool-sample distance; (5) workpiece surface can be imaged with spatial and vertical resolution in 1nm range; (6) workpiece surface can be patterned to any desired shape - rotationally symmetric or non-symmetric; (7) machining can be done with lateral resolution in the 30 nm - 10 um range. These features will make the proposed design superior to existing precision machining tools. The objectives of this project are two-fold -- (1) to develop an automated and versatile precision machining and imaging tool; (2) to build a prototype device for the study and validation of control methodologies, identification methods, and the interface of control and the mechanics of machining at a nano-scale. ***

Dahleh精密加工是一项重要的新兴技术，在光学，微电子，磁性和光学记录以及传感器和执行器等各个领域都有制造应用。随着小型化趋势的发展，对微米级和纳米级材料成型工具的需求预计将不断增加。鉴于此，我们提出设计、制造和使用一种基于原子力显微镜（AFM）概念的机床。原子力显微镜（AFM）是一项新发明，迄今为止已被用于原子尺度水平和垂直分辨率的表面成像。它通过反馈控制系统扫描样品表面上的尖锐触针探针，同时在探针尖端和样品表面之间保持恒定的接触力。我们建议使用触控探针作为切割工具，该系统具有以下特征：(1)切割深度范围为1nm - 10um，表面光洁度范围为0.1 nm -1 nm；(2)同时测量工具上的法向力和切向力，分辨率为10 nN至1 uN；(3)刀具与工件的相对运动可以是旋转和/或平移；(4)闭环鲁棒控制使刀样力或刀样距离保持恒定；(5)工件表面可实现1nm范围内的空间和垂直分辨率成像；(6)工件表面可以图案成任何所需的形状-旋转对称或非对称；(7)加工可以在30nm - 10um范围内进行横向分辨率。这些特点将使所提出的设计优于现有的精密加工工具。该项目的目标是双重的——(1)开发一种自动化和通用的精密加工和成像工具；(2)建立一个原型装置，用于研究和验证控制方法、识别方法以及控制与纳米级加工力学的接口。* * *