SBIR Phase I: High-Speed, In-Line Gas Monitoring for Control of Gas Mixing in Chemical Vapor Deposition (CVD) Systems

SBIR 第一阶段：高速在线气体监测，用于控制化学气相沉积 (CVD) 系统中的气体混合

• 批准号: 9660463
• 负责人: Chad Nelson
• 金额: $ 7.49万
• 依托单位: Advanced Fuel Research, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-01-01 至 1997-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9660463&HistoricalAwards=false
• 关键词: SBIR; Phase; Speed; Line; Gas

*** ABSTRACT 9660463 Nelson This Small Business Innovation Research Phase I project will develop a high-speed, in-line gas monitor for control of Gas Mixing in chemical vapor deposition systems. CVD has emerged as an important fabrication technique for advanced semiconducting and optoelectronic thin film materials. Without real-time monitoring and closed-loop control of the growth chemistry, it is extremely difficult to fabricate structures with multi-layered and graded compositional profiles. Fourier transform infrared spectroscopy has been demonstrated for process monitoring and recent innovations have improved the ruggedness and signal-to-noise ratio while reducing the size, weight, and cost of commercial instruments. In many applications, however, a long optical pathlength is required to achieve the desired measurement sensitivity. The use of standard, long-path "White" cells can significantly increase the pathlength while simultaneously increasing the sampled volume. This increased volume can increase the response time from spectral measurement and data analysis time to the time it takes to fill the cell with a representative sample, which can be on the order of several minutes. This Phase I project will develop a fast-response, in-line optical system to be used in conjunction with an advanced FT-IR spectrometer to provide real-time process and quality control in low flow systems such as CVD reactors. In addition to process and quality control in CVD and other chemical reactors, the proposed analysis system will be capable rapid measurement (1 sec) of other gases such as automobile exhaust, waste-site effluents, and fugitive emissions. The rapid response time will improve the efficacy of FT-IR and other spectroscopic techniques for detecting process upsets, fires, explosive atmospheres, and hazardous workplace conditions. ***

* 摘要 9660463纳尔逊 该小型企业创新研究第一阶段项目将开发一种高速在线气体监测器，用于控制化学气相沉积系统中的气体混合。CVD已经成为先进半导体和光电薄膜材料的重要制造技术。如果没有生长化学的实时监测和闭环控制，制造具有多层和梯度组成分布的结构是极其困难的。傅里叶变换红外光谱已被证明可用于过程监测，最近的创新提高了耐用性和信噪比，同时降低了商业仪器的尺寸，重量和成本。然而，在许多应用中，需要长的光程长度来实现期望的测量灵敏度。使用标准的长光程“白色”池可以显著增加光程，同时增加采样体积。这种增加的体积可以增加从光谱测量和数据分析时间到用代表性样品填充单元所花费的时间的响应时间，其可以是几分钟的量级。第一阶段项目将开发一种快速响应的在线光学系统，与先进的FT-IR光谱仪结合使用，为CVD反应器等低流量系统提供实时工艺和质量控制。 除了CVD和其他化学反应器中的过程和质量控制外，所提出的分析系统将能够快速测量（1秒）其他气体，如汽车尾气，废物处理场废水和逃逸排放物。快速响应时间将提高FT-IR和其他光谱技术检测过程干扰、火灾、爆炸性环境和危险工作场所条件的效率。***