SBIR Phase I: Compact, Stable Extreme-Ultraviolet (EUV) Light Source With Lisitano Coil Excitation

SBIR 第一阶段：采用 Lisitano 线圈激励的紧凑、稳定的极紫外 (EUV) 光源

• 批准号: 9661120
• 负责人: Ward Halverson
• 金额: $ 7.5万
• 依托单位: Spire Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-01-01 至 1997-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9661120&HistoricalAwards=false
• 关键词: SBIR; Phase; Compact; Stable; Extreme

*** ABSTRACT 9661120 Halverson This Small Business Innovation Research Phase I project will investigate the development of a highly efficient extreme-ultraviolet (EUV) source for absolute intensity and wavelength calibration of UV spectrometers and detectors, space environment simulation, accelerated environmental testing, and EUV surface treatments. An existing UV light source, with electron cyclotron resonance (ECR) plasma heating, has already demonstrated emission at wavelengths down to 30 nm. The goal of this Phase I effort is to generate powerful EUV radiation at even shorter wavelengths. The ECR-heated plasma, when driven by a "Lisitano coil" that maximizes microwave coupling, should produce multiply-charged ions with strong spectral features down to 5-10 nm. During Phase I, Spire will test a prototype Lisitano coil for microwave coupling efficiency; operate the existing UV light source in a modified magnetic field configuration to attain lower pressure, higher temperature ECR-heated plasmas with enhanced EUV emission; measure EUV output; and design a new light source with Lisitano coil excitation that will be built, tested, and calibrated in Phase II. The EUV light source will have much higher intensity, reliability, and reproducibility than duoplasmatrons and arcs and much lower cost than synchrotron radiation sources. In addition to UV instrument calibration, it will be valuable for accelerated environmental testing and surface treatment of medical and other products. ***

* 摘要 小行星9661120 这个小型企业创新研究第一阶段项目将研究开发一种高效的极紫外（EUV）光源，用于紫外光谱仪和探测器的绝对强度和波长校准，空间环境模拟，加速环境测试和EUV表面处理。现有的紫外光源，与电子回旋共振（ECR）等离子体加热，已经证明发射波长低至30纳米。第一阶段的目标是在更短的波长下产生强大的EUV辐射。当由最大化微波耦合的“Lisitano线圈”驱动时，ECR加热的等离子体应该产生具有低至5-10纳米的强光谱特征的多电荷离子。在第一阶段，Spire将测试原型Lisitano线圈的微波耦合效率;在修改后的磁场配置中操作现有的UV光源，以获得更低压力，更高温度的ECR加热等离子体，增强EUV发射;测量EUV输出;并设计一个新的光源与Lisitano线圈激励，将在第二阶段建造，测试和校准。 EUV光源将具有比双等离子体管和电弧高得多的强度、可靠性和再现性，并且比同步辐射源低得多的成本。 除了UV仪器校准之外，它还将对加速环境测试和医疗及其他产品的表面处理具有价值。***