SBIR Phase II: Ion Implanted Thin-Film Zinc Gallate Phosphors for Field Emission Displays

SBIR 第二阶段：用于场致发射显示器的离子注入薄膜没食子酸锌荧光粉

• 批准号: 9615987
• 负责人: Ward Halverson
• 金额: $ 29.07万
• 依托单位: Spire Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-07-15 至 1999-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9615987&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Ion; Implanted

Spire Corporation Ward Halverson This Small Business Innovation Research (SBIR) Phase II project will develop zinc gallate (ZnGa2O4) as a thin-film phosphor and produce full color faceplates by selective ion implantation of luminescence centers. Field emission displays (FEDs) based on cathodoluminescent phosphors are promising alternatives to active matrix liquid crystal displays; however, conventional sulfide-based powder phosphors compromise FED performance due to their granular nature, current-saturation characteristics, and limited operating lifetime. Replacing powdered phosphors with sulfur-free, thin film oxide materials can improve chromaticity, allow much finer definition, and increase phosphor lifetime, while reducing manufacturing costs. Phase I demonstrated bright red and green cathodoluminescence (CL) in sputter-deposited ZnGa2O4 which was ion implanted with europium and manganese; and bright blue CL was found from "self-activated" (Ga-rich) zinc gallate films. Phase II will optimize phosphor preparation, ion implantation and annealing, and increase external luminous efficiency by minimizing light-guiding in the thin-film phosphor. Organometallic chemical vapor deposition of ZnGa2O4 will be compared to sputter-deposition of the thin film phosphor host. A wider range of activator and co-activator ions and annealing schedules will be investigated. Multi-colmr phosphor faceplates will be fabricated and demonstrated in an operating FED device. Flat, field emission displays with high luminance, wide color gamut, high electrical efficiency, and long operating life will find applications in computer terminals, lap-top computers, instrument panels, navigational aids, and consumer electronics from cellular telephones to television sets.

这个小企业创新研究（SBIR）二期项目将开发没食子酸锌（ZnGa2O4）作为薄膜荧光粉，并通过选择性离子注入发光中心生产全彩面板。基于阴极发光荧光粉的场发射显示器是有源矩阵液晶显示器的理想替代品；然而，传统的硫化物基粉末荧光粉由于其颗粒性质、电流饱和特性和有限的使用寿命而影响了FED的性能。用无硫的薄膜氧化物材料代替粉末状荧光粉可以改善色度，允许更精细的清晰度，并增加荧光粉的使用寿命，同时降低制造成本。第一阶段，铕和锰离子注入溅射沉积的ZnGa2O4呈现出亮红色和绿色阴极发光（CL）；在“自活化”（富ga）没食子酸锌薄膜中发现亮蓝色CL。第二阶段将优化荧光粉的制备、离子注入和退火，并通过最小化薄膜荧光粉中的光导来提高外部发光效率。将ZnGa2O4的有机金属化学气相沉积与薄膜荧光粉基体的溅射沉积进行了比较。更广泛的活化剂和共活化剂离子和退火计划将被研究。多色荧光粉面板将在运行的FED设备中制造和演示。具有高亮度、宽色域、高效率和长使用寿命的平面场发射显示器将应用于计算机终端、笔记本电脑、仪表板、导航设备以及从移动电话到电视机的消费电子产品中。