Support for a Workshop on Tribology Needs in MEMS

支持 MEMS 摩擦学需求研讨会

• 批准号: 9707282
• 负责人: Bharat Bhushan
• 金额: $ 4万
• 依托单位: Ohio State University Research Foundation -DO NOT USE
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-03-01 至 1998-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9707282&HistoricalAwards=false
• 关键词: Support; Workshop; Tribology; Needs; MEMS

9707282 Bhushan Support is provided for a symposium on the tribological research needs in the area of micro-electro-mechanical systems (MEMS). Experts in MEMS and in nanotribology will assess the state of the art and outline the most pressing needs for basic research to address these needs, including lubricant design, surface treatments, silicon nanotribology, and tribological issues in MEMS manufacturing. ***

9707282 Bhushan 为微机电系统 (MEMS) 领域摩擦学研究需求研讨会提供支持。 MEMS 和纳米摩擦学领域的专家将评估最新技术水平，并概述满足这些需求的基础研究最紧迫的需求，包括润滑剂设计、表面处理、硅纳米摩擦学以及 MEMS 制造中的摩擦学问题。 ***