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Support for a Workshop on Tribology Needs in MEMS

Support for a Workshop on Tribology Needs in MEMS
支持 MEMS 摩擦学需求研讨会
批准号：
9707282
负责人：
Bharat Bhushan
金额：
$4.0万
依托单位：
Ohio State University Research Foundation -DO NOT USE
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
1997
资助国家：
美国
项目状态：
已结题
起止时间：
1997-03-01 至 1998-09-30
来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=9707282&HistoricalAwards=false
关键词：
SupportWorkshopTribologyNeedsMEMS

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中文摘要
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英文摘要
9707282 Bhushan Support is provided for a symposium on the tribological research needs in the area of micro-electro-mechanical systems (MEMS). Experts in MEMS and in nanotribology will assess the state of the art and outline the most pressing needs for basic research to address these needs, including lubricant design, surface treatments, silicon nanotribology, and tribological issues in MEMS manufacturing. ***
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Development, Characterization, and Application of Advanced Coatings for Improving the Reliability of MEMS/NEMS Devices
SGER: Use of Phase Imaging in Atomic Force Microscopy for Measurement of Viscoelastic Contrast in Polymer Nanocomposites and Molecularly-Thick Lubricant Films
U.S.-Germany Cooperative Research: Ultrsonic Force and Friction Force Microscopy Applied to Thin Lubricant Films for Magnetic Storage
Fundamentals of Tribology and Bridging The Gap Between Macro-And Micro/Nanoscale Tribology
  • 批准号：
    0002976
  • 项目类别：
    Standard Grant
  • 资助金额：
    $0.0万
  • 财政年份：
    2000
  • 负责人：
    Bharat Bhushan
  • 依托单位：
    Ohio State University
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