Development, Characterization, and Application of Advanced Coatings for Improving the Reliability of MEMS/NEMS Devices

用于提高 MEMS/NEMS 器件可靠性的先进涂层的开发、表征和应用

• 批准号: 0301056
• 负责人: Bharat Bhushan
• 金额: --
• 依托单位: Ohio State University Research Foundation -DO NOT USE
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-04-15 至 2007-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0301056&HistoricalAwards=false
• 关键词: Development; Characterization; Application; Advanced; Coatings

Advanced coatings will be developed by molecular and atomic design and tailoring of self-assembled monolayers (SAMs), diamond like carbon films (DLC), and organic/inorganic bilayers (perfluoropolyethers or SAMs on DLC), which are expected to have enhanced functionalities and to greatly improve the reliability of MEMS/NEMS. Understanding of the relationship between micro/nanotribological and mechanical performance of DLC and SAMs and their atomic and molecular structures will be clarified. The microstructure of these coatings will be characterized by various techniques. Their micro/nanoscale tribological properties will be mainly characterized by atomic force microscopy (AFM) and a novel microtriboapparatus developed by our laboratory.The effect of length scale, velocity, relative humidity, and temperature on the performance will be investigated. The micro/nanoscale mechanical properties of advanced DLC coatings will be mainly studied using a nanoindenter and AFM based bending and fatigue tests. The relationship between the process, structure, and performance will be addressed in order to obtain superior performance coatings. Computer modeling of adhesion relevant for MEMS/NEMS will be performed, in which the contribution of meniscus formation, electrostatic, van der Waals forces, and solid bridging will be considered. Knowledge of optimum surface characteristics and advanced coatings will be applied to an industrial application to improve their reliability. The pixel failure mechanisms of digital micromirror devices (DMD) will be studied. Methods to minimize adhesion, stiction/friction and wear will be incorporated in DMD devices. (Two support letters from industry are attached.) This study is expected to be beneficial to both the MEMS/NEMS research and industry.An award would support two graduate students and partially support one postdoctoral researcher. This would provide an opportunity to recruit and fund a minority or woman. The PI and his department have made efforts to attract such students in recent years. The department regularly invites, and provides travel grants for, students, particularly women and minorities, from other schools to attract them for graduate studies. Undergraduate students would work on the project as well. Projects like these provide hands-on opportunities for undergraduate students in a high-tech lab. Past undergraduates in the PI's lab have actually coauthored articles for technical journals. This project will provide additional material for the PI's course on tribology and in soon-to-be-developed nanotribology courses.

先进的涂层将通过分子和原子的设计和自组装单分子层（SAMs），类金刚石碳膜（DLC）和有机/无机双层（全氟聚醚或SAMs在DLC上）的定制来开发，预计将具有增强的功能并大大提高MEMS/NEMS的可靠性。将阐明DLC和自组装膜的微/纳米摩擦学和机械性能与其原子和分子结构之间的关系。这些涂层的微观结构将通过各种技术来表征。利用原子力显微镜（AFM）和自行研制的新型微摩擦磨损试验装置，研究了长度尺度、速度、相对湿度和温度等因素对微/纳米摩擦学性能的影响。先进的DLC涂层的微/纳米级的机械性能将主要使用纳米压头和基于AFM的弯曲和疲劳测试进行研究。为了获得上级性能涂层，将讨论工艺、结构和性能之间的关系。将进行与MEMS/NEMS相关的粘附力的计算机建模，其中将考虑弯月面形成、静电、货车范德华力和固体桥接的贡献。最佳表面特性和先进涂层的知识将应用于工业应用，以提高其可靠性。研究了数字微镜器件（DMD）的像素失效机理。DMD器械将采用最小化粘附、静摩擦/摩擦和磨损的方法。(Two工业界的支持信附后。本研究可望对MEMS/NEMS的研究和产业界都有助益，并将提供两名研究生和一名博士后研究员的部分资助。这将提供一个招募和资助少数群体或妇女的机会。近年来，PI和他的部门一直在努力吸引这些学生。该部定期邀请其他学校的学生，特别是妇女和少数民族学生，并为他们提供旅费赠款，以吸引他们攻读研究生课程。本科生也将参与该项目。像这样的项目为本科生提供了在高科技实验室动手的机会。PI实验室过去的本科生实际上已经为技术期刊合著了文章。该项目将为PI的摩擦学课程和即将开发的纳米摩擦学课程提供额外的材料。