Lubricant Film Thickness Mapping Using a Scanning Capacitance Technique with a Nanoscale Lateral Resolution

使用具有纳米级横向分辨率的扫描电容技术绘制润滑油膜厚度图

• 批准号: 0001382
• 负责人: Bharat Bhushan
• 金额: --
• 依托单位: Ohio State University Research Foundation -DO NOT USE
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-02-15 至 2002-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0001382&HistoricalAwards=false
• 关键词: Lubricant; Film; Thickness; Mapping; Using

An SGER award will support development of a novel scanning capacitance measurement technique for lubricant film thickness mapping on engineering surfaces. It is expected that this technique will allow non-destructive mapping of variations in lubricant thickness as small as 0.1 nm and with a nanoscale lateral resolution. Existing techniques allow measurements only with a microscale lateral resolution. The proposed technique is of great interest in applications where lubricant films of mono-molecular thickness are used. It is expected that the proposed technique, if successful, can be developed for quality control purposes for the $ 100 billion per year magnetic storage industry, the emerging microdevices industry, and other applications using ultra-thin films. An existing AFM will be adapted with a scanning capacitance microscopy module, which will be modified to operate with a sharp, conducting probe. The measurements, as envisioned, will consist of an initial conventional AFM topography scan of the metal surface, followed by a scan in the same track but in the capacitance mode and with the tip at 100 nm height above the metal surface, as controlled by input from the topography scan.

SGER 奖项将支持开发一种新型扫描电容测量技术，用于工程表面润滑油膜厚度测绘。 预计该技术将能够以纳米级横向分辨率对小至 0.1 nm 的润滑剂厚度变化进行非破坏性测绘。 现有技术仅允许以微米级横向分辨率进行测量。 所提出的技术在使用单分子厚度的润滑膜的应用中引起了极大的兴趣。 预计所提出的技术如果成功，可以用于每年价值 1000 亿美元的磁存储行业、新兴的微器件行业以及其他使用超薄膜的应用的质量控制目的。 现有的原子力显微镜将配备扫描电容显微镜模块，该模块将被修改为与锋利的导电探针一起操作。 正如设想的那样，测量将包括对金属表面进行初始常规 AFM 形貌扫描，然后在同一轨迹中以电容模式进行扫描，并且尖端位于金属表面上方 100 nm 高度，由形貌扫描的输入控制。