Industry/University Cooperative Research Center: Development of MEMS Tuning Elements for Millimeter-Wave Circuits

摘要EEC-9714141白色利用微电子机械系统(MEMS)技术生产一种用于微调和提供微波/毫米波集成电路所需的精细RF调谐调节的装置是潜在的可行的。然而，到目前为止，还没有关于该技术在MEMS设备中的演示的报道。该奖项支持加州大学伯克利分校的伯克利传感器和致动器中心(BSAC)和科罗拉多大学博尔德分校的微波、光学和数字电子先进制造和封装中心(CAMPmod)之间的一个TIE项目，以开发在微波/毫米波频率下的完整数值/实验表征，以得出MEMS的射频网络模型。开发的方法将通过在用于移动和便携式系统的高效率开关模式微波/毫米波功率放大器中的实施来说明。CAMP MODE是毫米波封装技术的领先大学研究中心之一，BSAC是MEMS技术开发的领先研究机构之一。这两个中心加在一起，完全有资格执行拟议的研究，这是一个两个中心都没有能力单独执行的项目。

ABSTRACT EEC-9714141 WHITE It is potentially feasible to use MicroElectroMechanical Systems (MEMS) technology to produce a device for trimming and providing the fine RF tuning adjustments needed in microwave/millimeter-wave integrated circuits. However, to date there has not been a reported demonstration of this technique in a MEMS device. This award supports a tie project between two Industry/University Cooperative Research Centers, Berkeley Sensors and Actuators Center (BSAC) at the University of California at Berkeley, and the Center for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics (CAMPmode) at the University of Colorado at Boulder, to develop a complete numerical/experimental characterization at microwave/millimeter-wave frequencies to derive an RF network model for MEMS. The methodology developed will be illustrated by implementation of the technique in a high-efficiency, switched mode microwave/millimeter-wave power amplifier for mobile and portable systems. CAMPmode is one of the leading university research centers in millimeter microwave packaging technologies, and BSAC is one of the leading research facilities in the development of MEMS technology. Together, these two Centers are well qualified to perform the proposed research, which is a project that neither Center has the capability to perform on its own.