Industry/University Cooperative Research Center: Development of MEMS Tuning Elements for Millimeter-Wave Circuits

摘要EEC-9714141白色 使用微机电系统（MEMS）技术来生产用于微调和提供微波/毫米波集成电路中所需的精细RF调谐调节的装置是潜在可行的。 然而，到目前为止，还没有报道在MEMS器件中演示这种技术。 该奖项支持两个行业/大学合作研究中心之间的联系项目，即加州大学伯克利分校的伯克利传感器和致动器中心（BSAC）以及微波、光学和数字电子先进制造和封装中心（CAMPmode）在博尔德的科罗拉多大学，在微波/毫米波频率下开发完整的数值/实验表征，以导出MEMS的RF网络模型。 开发的方法将通过实施该技术的高效率，开关模式微波/毫米波功率放大器的移动的和便携式系统来说明。 CAMPmode是毫米波封装技术的领先大学研究中心之一，BSAC是MEMS技术发展的领先研究机构之一。 这两个中心合在一起完全有资格开展拟议的研究，这是一个两个中心都没有能力单独开展的项目。

ABSTRACT EEC-9714141 WHITE It is potentially feasible to use MicroElectroMechanical Systems (MEMS) technology to produce a device for trimming and providing the fine RF tuning adjustments needed in microwave/millimeter-wave integrated circuits. However, to date there has not been a reported demonstration of this technique in a MEMS device. This award supports a tie project between two Industry/University Cooperative Research Centers, Berkeley Sensors and Actuators Center (BSAC) at the University of California at Berkeley, and the Center for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics (CAMPmode) at the University of Colorado at Boulder, to develop a complete numerical/experimental characterization at microwave/millimeter-wave frequencies to derive an RF network model for MEMS. The methodology developed will be illustrated by implementation of the technique in a high-efficiency, switched mode microwave/millimeter-wave power amplifier for mobile and portable systems. CAMPmode is one of the leading university research centers in millimeter microwave packaging technologies, and BSAC is one of the leading research facilities in the development of MEMS technology. Together, these two Centers are well qualified to perform the proposed research, which is a project that neither Center has the capability to perform on its own.