Charge Transfer and Scattering Dynamics in Kiloelectron Volt and Hyperthermal Energy Ion-Surface Collisions

[9722771] Cooper这个名为“千电子伏特和超高能离子表面碰撞中的电荷转移和散射动力学”的项目强调了实验与电荷转移和散射机制的广泛建模的耦合。它主要关注两个主题。首先是高温离子-表面碰撞中的多态电荷转移动力学，其中表面和原子电子结构对电荷转移动力学的影响用多态电荷转移代码建模，该代码求解了与表面同时相互作用的几个原子态的时变薛定谔方程。第二个主题是原子氧离子与表面碰撞中的电荷转移、捕获和散射动力学，由于非常具有挑战性的实验问题，这个系统很少受到关注。所有的实验都探索了离子表面相互作用，这些相互作用对于等离子体和离子束薄膜生长以及用于器件的半导体材料的等离子体加工等领域的先进材料的制造和加工至关重要。＊＊＊

1 9722771 Cooper This project entitled Charge Transfer and Scattering Dynamics in Kiloelectron Volt and Hyperthermal Energy Ion-Surface Collisions emphasizes a coupling of experiments with extensive modeling of charge transfer and scattering mechanisms. It focuses on two major topics. The first is multi-state charge transfer dynamics in hyperthermal ion-surface collisions where the effects of surface and atom electronic structure on charge transfer dynamics is modeled with a multi-state charge transfer code that solves the time-dependent Schrodinger equation for several atomic states interacting simultaneously with the surface. The second topic is charge transfer, trapping and scattering dynamics in atomic oxygen ion collisions with surfaces, a system that has received little attention due to very challenging experimental issues. %%% All of the experiments explore ion-surface interactions that are fundamentally important to fabrication and processing of advanced materials in areas such as plasma and ion beam thin film growth, and the plasma processing of semiconductor materials for devices. ***