CAREER: The Chemistry of Etching: Understanding Kinetic Surface Morphologies on an Atomic Scale

这个教师早期职业发展（CAREER）项目，在支持 分析和表面化学计划，侧重于详细的 微观，宏观，和计算表征蚀刻 硅表面。 特别地，使用一类新的水性， 将研究氟基蚀刻剂。 海因斯教授和她 康奈尔大学的学生将使用扫描隧道显微镜 为了研究所得蚀刻图案的物理结构（质量 虽然蚀刻速率测量将给出 过程 蒙特卡罗计算将被纳入，以帮助模拟 观察到的化学。 这个职业项目将提高 计算技能的本科生和研究生，通过 “化学家的数值分析”课程的实施。 教授 海因斯还将提高学生的准备工作，通过 写作和公开演讲技巧的研讨会。 研究和开发新的化学物质，可用于 半导体处理系统仍然是一个非常活跃的领域 research. 康奈尔大学的海因斯教授和她的学生们 结合物理测量技术和计算机模拟 以评估一种新的水性氟基蚀刻剂族的使用。 先前的研究表明，原子级平坦的硅表面 可以通过这些方法生产。 这个职业生涯项目拥有 有可能产生具有重大技术意义的成果。 海因斯教授将促进科学家的发展， 计算化学的重要领域，通过引入 该领域的新本科生/研究生课程。 技术 写作和公开演讲技能将通过专题开发 研讨会和课程。

This Faculty Early Career Development (CAREER) project, supported in the Analytical and Surface Chemistry Program, focuses on the detailed microscopic, macroscopic, and computational characterization of etched silicon surfaces. In particular, the use of a new class of aqueous, fluorine-based etchants will be investigated. Professor Hines and her students at Cornell University will employ scanning tunneling microscopy to study the physical structure (quality) of the resultant etch patterns while etch rate measurements will give evidence of the kinetics of the process. Monte Carlo calculations will be incorporated to help simulate the observed chemistry. This CAREER project will improve the computational skills of undergraduates and graduates through the implementation of a `Numerical Analysis for Chemists` course. Professor Hines will also improve students' readiness for the workforce through seminars in writing and public speaking skills. The study and development of new chemistries which can be applied to semiconductor processing systems continues to be a very vibrant area of research. Professor Hines and her students at Cornell University are combining physical measurement techniques and computational simulations to evaluate the use of a new family of aqueous, fluorine-based etchants. Previous studies have suggested that atomically flat silicon surfaces could be produced by these methods. This CAREER project holds the promise of producing results of substantial technological importance. Professor Hines will enhance the development of scientists with skills in the important area of computational chemistry through the introduction of a new undergraduate/graduate student course in that area. Technical writing and public speaking skills will be developed through topical seminars and coursework.