Numerical and Experimental Investigation of Laser Micromachining Processes for Improved Precision and Prediction Capabilities

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DMI-9813453Yao The coupled relationships among various aspects of ablative laser micromachining processes will be modeled, numerically explored, and experimentally validated. A transient three-dimensional model embracing coupled equations for heat transfer and phase change in solid material, evaporation and gas dynamics associated with a Knudsen layer, and effects of plasma will be developed. A control-volume based finite-difference algorithm with power-law scheme will be used for the solid/liquid and plasma regions while an integral method will be used to solve for jump conditions in the Knudsen layer. The model will predict machined geometry, energy transport, recoil momentum, plasma flow, particle ejection, and debris formation. More precise knowledge and improved prediction capabilities will result from the research. This will help meet the need arisen from the trend towards smaller spatial and temporal scales in laser micromachining. The project will also provide valuable insights into future development of quantitative prediction capabilities in other regimes of the field.