An Integrated Circuit Fabrication and Characterization Laboratory

点击翻译按钮获取中文摘要

A laboratory course in semiconductor device processing and characterization is proposed which will form a key element of a new curriculum in Applied Physics being developed by the Physics Department at the University of Oregon. Funds are requested from the NSF-ILI program in order to develop this laboratory. The goal of the new curriculum is to better prepare physics majors and majors in allied fields such as chemistry for constructive participation in an industrial internship program, and ultimately for productive careers in the semiconductor manufacturing industry. The laboratory course constitutes an essential component of the new program and will expose physics and chemistry majors to technologically important issues in an area not traditionally covered in undergraduate physics or chemistry curricula.