SBIR Phase I: Chemical Amplification for Detection of Ultra Low Levels of Total Organic Carbon

SBIR 第一阶段：用于检测超低水平总有机碳的化学放大

• 批准号: 9860157
• 负责人: James Akse
• 金额: $ 10万
• 依托单位: Umpqua Research Company
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-01-01 至 1999-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9860157&HistoricalAwards=false
• 关键词: SBIR; Phase; Chemical; Amplification; Detection

9860157 Ultra-pure water is required for the semiconductor fabrication and pharmaceutical industries. One extremely important water quality parameter is dissolved organic carbon content. The electronics industry currently limits total organic carbon (TOC) content of semiconductor fabrication process waters to 10 ug/L. The majority of analytical instruments which are currently available to monitor TOC at these levels utilize specific conductance detection of the dissolved HC03-/CO2= species which result from the photo-oxidation or combined chemical oxidation and photo-oxidation of dissolved organics. We propose an investigation of methods which can be used to improve sensitivity of TOC monitoring instruments by a factor of up to two orders of magnitude by chemically amplifying the conductivity signal. The proposed technology is based upon the transport of C02, resulting from the oxidation of dissolved organic species, across a semipermeable membrane into a alkanolamine solution where ionic compounds are formed by chemical reaction with C02-. Successful development of a TOC detection methodology which provides substantially lower limits of detection than can be achieved using currently available instrumentation is expected to result in the design, manufacture, and marketing of an advanced generation of instruments for ultra-pure water characterization in support of semiconductor and pharmaceutical industries. The new detector will be suitable for use in both laboratory instruments and continuous flow process analyzers.

9860157 半导体制造和制药工业需要超纯水。一个非常重要的水质参数是溶解有机碳含量。电子工业目前将半导体制造工艺沃茨的总有机碳（TOC）含量限制在10 ug/L。目前可用于监测这些水平的TOC的大多数分析仪器利用溶解的HCO 3-/CO2=物质的比电导检测，所述溶解的HCO 3-/CO2=物质由溶解的有机物的光氧化或组合的化学氧化和光氧化产生。我们提出了一个调查的方法，可以用来提高灵敏度的TOC监测仪器的一个因素，高达两个数量级的化学放大的电导率信号。所提出的技术是基于由溶解的有机物质的氧化产生的CO2穿过半透膜进入烷醇胺溶液中的输送，在烷醇胺溶液中通过与CO2-的化学反应形成离子化合物。 TOC检测方法的成功开发，它提供了大大低于使用目前可用的仪器可以实现的检测限，预计将导致在设计，制造和销售的先进一代的仪器的超纯水表征，以支持半导体和制药行业。新的检测器将适用于实验室仪器和连续流动过程分析仪。