SBIR Phase I: Improvement of Spatial Resolution in Scanning Microwave Microscopy

9861455 该小型企业创新研究（SBIR）第一阶段项目旨在开发一种扫描探针微波显微镜，其空间分辨率为100 MHz至50 GHz频率范围内的半导体表征。拟议的仪器是基于现有的低分辨率扫描微波显微镜（SMM），具有提供定量数据的能力。所提出的方法的主要重点是保持这一定量方面的文书，同时提高空间分辨率。因此，它提出了一种替代技术的基础上扫描隧道或扫描力显微镜。 该显微镜包括一个谐振同轴电缆耦合到微波发生器的一端和样品通过一个开放式同轴探头的另一端。样品的渗透率和电导率导致同轴电缆的谐振频率和Q因子的可测量的偏移。 亚微米的空间分辨率在非接触模式下将通过使用压电驱动器控制探针到样品的分离，在恒定频移或恒定Q因子模式下成像，并使用STM尖端作为同轴探针的中心导体来实现。 这项研究的长期目标是提供一个原型扫描微波显微镜，提高了空间分辨率，并在微波频率的定量半导体表征的性能得到证实。这种仪器的众多潜在应用使其成为商业化的绝佳候选者。

9861455 This Small Business Innovation Research (SBIR) Phase I project aims to develop a scanning probe microwave microscope with sub-n-ficrometer spatial resolution for semiconductor characterization in the frequency range of 100 MHz to 50 GHz. The proposed instrument is based on an existing low-resolution scanning microwave microscope (SMM) with a demonstrated capability of providing quantitative data. The primary focus of the proposed approach is to preserve this quantitative aspect of the instrument while improving spatial resolution. It thus presents an alternative to techniques based on scanning tunneling or scanning force microscopes. The microscope consists of a resonant coaxial cable coupled to a microwave generator on one end and to the sample through an open-ended coaxial probe on the other end. The sample's pen-nittivity and conductivity result in a measurable shift of the coaxial cable's resonant frequency and Q-factor. Sub-micron spatial resolution in a non-contact mode will be achieved by controlling the probe-to-sample separation using a piezo-driver, imaging in a constant frequency shift or constant Q-factor mode, and using an STM tip as the center conductor of the coaxial probe. The long-term goal of this research is to provide a prototype scanning microwave microscope with improved spatial resolution and proven performance in quantitative semiconductor characterization at microwave frequencies. The multitude of potential applications of such an instrument make it an excellent candidate for commercialization.