CAREER: A Study of Temperature in Rapid Thermal Engineering of Glass Films

职业：玻璃膜快速热工程温度研究

• 批准号: 9875860
• 负责人: Ted Bennett
• 金额: $ 20万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-03-01 至 2004-02-29
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9875860&HistoricalAwards=false
• 关键词: CAREER; Study; Temperature; Rapid; Thermal

The principal investigator proposes to study pulsed laser deposition and thermal processing of glass films for micro-technologies. Thermal engineering is the single most powerful technique for controlling the thermo- physical, electrical, optical, and mechanical properties of films. In pulsed laser deposition and processing of glass films, the time-scale and the energy cascade process prevent notions of classical equilibrium transport from providing even a first order accurate description of some aspects of processes. This program will explore the plurality of "temperature" in microscale systems, and establish interrelationships between characteristic values. Typical questions such as what is the relationship between the microstructural temperature of a glass and the translational temperature of the vapor used to deposit the film and how is the translational temperature of a vapor plume related to the temperature of the sputttering target will be examined. Facets by which the processing temperatures can control film properties will be studied.Coupled with the research is a program to expand the core competencies of mechanical engineers to include microscale thermal engineering. The course "Thermal Nature of Matter" will be developed to give a nontrivial background into energy storage and transport at the atomic level. This class will combine new processing techniques with a fundamental understanding of microscale thermal science.

首席研究员提议研究微技术中玻璃薄膜的脉冲激光沉积和热处理。 热工程是控制薄膜热物理、电学、光学和机械性能的最强大的技术。 在玻璃薄膜的脉冲激光沉积和加工中，时间尺度和能量级联过程阻止了经典平衡输运的概念提供对过程某些方面的一阶准确描述。 该计划将探索微尺度系统中的多个“温度”，并建立特征值之间的相互关系。 将研究诸如玻璃的微观结构温度与用于沉积薄膜的蒸气的平移温度之间的关系以及蒸气羽流的平移温度与溅射靶材的温度如何相关等典型问题。 我们将研究加工温度控制薄膜性能的各个方面。与这项研究相结合的是一项旨在扩展机械工程师核心能力的计划，其中包括微观热工程。 将开发“物质的热性质”课程，为原子水平的能量存储和传输提供重要的背景知识。 本课程将把新的加工技术与对微尺度热科学的基本理解结合起来。