SBIR PHASE II: Novel Microcrystalline Silicon Solar Cell Devices Prepared Using a Unique Microwave Gas Jet Deposition Technique

SBIR 第二阶段：采用独特的微波气体喷射沉积技术制备的新型微晶硅太阳能电池器件

• 批准号: 9901811
• 负责人: Scott Jones
• 金额: $ 40万
• 依托单位: Energy Conversion Devices, Inc. (ECD, Inc.)
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-08-01 至 2001-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9901811&HistoricalAwards=false
• 关键词: SBIR; PHASE; II; Novel; Microcrystalline

This Small Business Innovation Research (SBIR) Phase II will further develop a novel microwave Gas Jet technique for its use the production of high efficiency microciystalline silicon solar cells at high deposition rates. In Phase I, it was demonstrated technique can he used to prepare microcrystalline silicon i-layers for single-junction nip solar cells at deposition A/s, rate 3-5 times high than those obtained using standard techniques. These rates make the large-scale production microcrystalline cells economically feasible. Microcrystalline cells are an attractive alternative to amorphous silicon germanium cells as red light absorbing structures in high efficiency amorphous silicon based multi-junction solar cell devices because their efficiencies do not degrade with long-term light exposure. Thus use of the microcyrstalline materials will lead to higher stable efficiencies for the multi-junction cells. In Phase II, the solar cell efficiencies for these microcrystalline cells will be further improved through optimization of the deposition conditions which include the use of carbon and fluorine based gases, and use of new load-locked hardware for the preparation of doped layers without air exposure of layer interfaces. Also, hardware designs for large-scale usage of the Gas Jet technique will be tested. A successful program will lead to the replacement of the standard rf glow discharge deposition technique in ECD's joint venture solar module production lines with the Gas Jet technique as well as the replacement or red-light absorbing amorphous silicongermanium layers in ECD's triple-junction solar cell design with more stable microcrystalline layers. As a result, we will fabricate modules with higher stable efficiencies at reduced costs. This will lead to a wider use of Photovoltaic (PV) products thereby reducing the dependency on fossil fuel energy sources. Development of a high deposition rate technique to prepare high quality microcrystallitic silicon could also be used in other applications such as in thin film transistors, photodetectors, and photosensors.

这项小型企业创新研究（SBIR）第二阶段将进一步开发一种新型的微波气射流技术，用于使用高效率的微型囊泡硅太阳能电池以高沉积速率。 在第一阶段，他可以证明他可以用来准备微晶硅I层用于沉积A/S的单连接nip太阳能电池，比使用标准技术获得的微晶硅。这些速率使大规模生产微晶细胞在经济上可行。 微晶细胞是无定形硅细胞的有吸引力替代品，因为在高效率无定形硅的红光吸收结构基于多阶段的多阶段太阳能电池设备，因为它们的效率不会随长期光照而降低。 因此，使用微囊层材料将导致多结细胞的稳定效率较高。 在第二阶段，通过优化沉积条件，将进一步改善这些微晶细胞的太阳能电池效率，包括使用碳和氟的气体，以及使用新的负载锁定硬件用于制备而无需曝光层接口的掺杂层。 此外，还将测试用于大规模使用的硬件设计。 成功的程序将导致使用燃气喷气机技术以及ECD的三重型硅胶层中的替换或替换或红光吸收的替换或替换量或红色光线，并带有更稳定的微晶层层层。 结果，我们将以降低的成本制造具有较高稳定效率的模块。这将导致更广泛地使用光伏（PV）产品，从而减少对化石燃料能源的依赖性。 制备高质量微晶硅的高沉积速率技术的开发也可以用于其他应用中，例如在薄膜晶体管，光电探测器和光传感器中。